IP Library › Granted Patent US 10,163,765
Granted Patent B2
US 10,163,765 · App. 15/440,862 · Granted Dec 25, 2018

Semiconductor device that includes a molecular bonding layer for bonding of elements

Inventor: Akihiko Happoya (Ome Tokyo, JP)
Assignee: Kabushiki Kaisha Toshiba
H01L23/49579H01L21/56H01L23/293H01L23/3114H01L23/3128H01L23/4952H01L23/49555H01L24/32H01L24/49H01L24/73H01L24/83H01L24/85H01L24/92H01L24/45H01L2224/2919H01L2224/32225H01L2224/32245H01L2224/45144H01L2224/45147H01L2224/4852H01L2224/48091H01L2224/48106H01L2224/48227H01L2224/48247H01L2224/73265H01L2224/8592H01L2224/92247H01L2924/01026H01L2924/01028H01L2924/01029H01L2924/01042H01L2924/01047H01L2924/01074H01L2924/1033H01L2924/10253H01L2924/10272H01L2924/13064H01L2924/13091H01L2924/15311
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Quick Facts
Patent No.
US 10,163,765
App. No.
15/440,862
Granted
Dec 25, 2018
Kind
B2
Abstract

A semiconductor device includes a semiconductor chip having a terminal thereon, a lead frame for connection to an external device, a bonding wire connecting the terminal of the semiconductor chip and the lead frame. A mold resin layer encloses the semiconductor chip and the bonding wire, such that a portion of the lead frame extends out of the mold resin layer. A molecular bonding layer has a portion on a surface of the bonding wire and includes a first molecular portion covalently bonded to a material of the bonding wire and a material of the mold resin layer.

Claims (52)

1. A semiconductor device comprising:

a semiconductor chip having a terminal thereon;

a lead frame for connecting to an external device;

a bonding wire connecting the terminal and the lead frame;

a mold resin layer enclosing the semiconductor chip and the bonding wire, a portion of the lead frame extending out of the mold resin layer; and

a molecular bonding layer having a first portion on a surface of the bonding wire and having a first molecular portion covalently bonded to a material of the bonding wire and a material of the mold resin layer, and a second portion on a surface of the lead frame and having a second molecular portion covalently bonded to a material of the lead frame and the material of the mold resin layer,

wherein the lead frame comprises a metal plating layer on a main body thereof, and the second molecular portion is covalently bonded to a metal of the metal plating layer, and

wherein the molecular bonding layer includes a triazine derivative having a general formula:

where, in the general formula, R is one of a hydrocarbon group or a hydrocarbon group including at least one of a hetero atom or a functional group therein, X is a hydrogen atom or a hydrocarbon group, Y is an alkoxy group, and Z is one of a thiol group, an amino group, an azido group, any salt thereof, a hydrocarbon group, or a hydrocarbon group including at least one of a hetero atom or a functional group therein, n1 is an integer from 1 to 3, and n2 is equal to 1 or 2.

2. The semiconductor device according to claim 1 , wherein

at least a portion of the molecular bonding layer is a monomolecular layer.

3. The semiconductor device according to claim 1 , wherein

the molecular bonding layer is not formed on the portion of the lead frame that extends out of the mold resin layer.

4. The semiconductor device according to claim 1 , wherein

a third portion of the molecular bonding layer is on a surface of the semiconductor chip and includes a third molecular portion covalently bonded to a material of the semiconductor chip and the material of the mold resin layer.

5. The semiconductor device according to claim 1 , further comprising:

a base to which the semiconductor chip is bonded via a conductive bonding layer, wherein

a third portion of the molecular bonding layer is on a surface of the base and includes a third molecular portion covalently bonded to a material of the base and the material of the mold resin layer.

6. The semiconductor device according to claim 5 , wherein

the molecular bonding layer covers exposed surfaces of the semiconductor chip and the base.

7. A semiconductor device comprising:

a semiconductor chip having a terminal thereon;

a lead frame for connecting to an external device;

a bonding wire connecting the terminal and the lead frame;

a mold resin layer enclosing the semiconductor chip and the bonding wire, a portion of the lead frame extending out of the mold resin layer; and

a molecular bonding layer having a first portion on a surface of the lead frame and including a first molecular portion covalently bonded to a material of the lead frame and a material of the mold resin layer,

wherein the lead frame comprises a metal plating layer on a main body thereof, and the first molecular portion is covalently bonded to a metal of the metal plating layer,

wherein the molecular bonding layer includes a triazine derivative having a general formula:

where, in the general formula, R is one of a hydrocarbon group or a hydrocarbon group including at least one of a hetero atom or a functional group therein, X is a hydrogen atom or a hydrocarbon group, Y is an alkoxy group, and Z is one of a thiol group, an amino group, an azido group, any salt thereof, a hydrocarbon group, or a hydrocarbon group including at least one of a hetero atom or a functional group therein, n1 is an integer from 1 to 3, and n2 is equal to 1 or 2.

8. The semiconductor device according to claim 7 , wherein

at least a portion of the molecular bonding layer is a monomolecular layer.

9. The semiconductor device according to claim 7 , wherein

the molecular bonding layer is not formed on the portion of the lead frame that extends out of the mold resin layer.

10. The semiconductor device according to claim 7 , wherein

a second portion of the molecular bonding layer is on a surface of the semiconductor chip and includes a second molecular portion covalently bonded to a material of the semiconductor chip and the material of the mold resin layer.

11. The semiconductor device according to claim 7 , further comprising:

a base to which the semiconductor chip is bonded via a conductive bonding layer, wherein

a second portion of the molecular bonding layer is on a surface of the base and includes a second molecular portion covalently bonded to a material of the base and the material of the mold resin layer.

12. A semiconductor device comprising:

a semiconductor chip having a terminal thereon;

a lead frame for connecting to an external device;

a bonding wire connecting the terminal and the lead frame;

a mold resin layer enclosing the semiconductor chip and the bonding wire, a portion of the lead frame extending out of the mold resin layer; and

a molecular bonding layer having a first portion on a surface of the bonding wire and having a first molecular portion covalently bonded to a material of the bonding wire and a material of the mold resin layer,

wherein the molecular bonding layer further includes portions respectively on a terminal of the semiconductor chip, the lead frame, and an exposed surface of the semiconductor chip, and the portions respectively include a second molecular portion covalently bonded to a material of the terminal of the semiconductor chip and the material of the mold resin layer, a third molecular portion covalently bonded to a material of the lead frame and the material of the mold resin layer, and a fourth molecular portion covalently bonded to a material of the semiconductor chip and the material of the mold resin layer.

13. A semiconductor device comprising:

a semiconductor chip having a terminal thereon;

a lead frame for connecting to an external device;

a bonding wire connecting the terminal and the lead frame;

a mold resin layer enclosing the semiconductor chip and the bonding wire, a portion of the lead frame extending out of the mold resin layer; and

a molecular bonding layer having a first portion on a surface of the lead frame and including a first molecular portion covalently bonded to a material of the lead frame and a material of the mold resin layer,

wherein the molecular bonding layer further includes portions respectively on a terminal of the semiconductor chip, an exposed surface of the semiconductor chip, and the bonding wire and the portions respectively include a second molecular portion covalently bonded to a material of the terminal of the semiconductor chip and the material of the mold resin layer, a third molecular portion covalently bonded to a material of the semiconductor chip and the material of the mold resin layer, and a fourth molecular portion covalently bonded to a material of the bonding wire and the material of the mold resin layer.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 29, 2017
From: HAPPOYA, AKIHIKO
To: KABUSHIKI KAISHA TOSHIBA
Reel/Frame 041789/0039 →
Continuity (3)
Provisional Application 62324702 · Apr 19, 2016
Provisional Application 62382041 · Aug 31, 2016
Related Publication 20170301615A1 · Oct 19, 2017
Cited By (1)
US 12,512,359