Adhesive for temporary bonding, adhesive layer, wafer work piece and method for manufacturing semiconductor device using same, rework solvent, polyimide copolymer, polyimide mixed resin, and resin composition
The present invention provides a temporary-bonding adhesive having excellent heat resistance, whereby a semiconductor circuit formation substrate and a support substrate can be bonded by a single type of adhesive layer, the adhesive force thereof does not change over the course of steps for manufacturing a semiconductor device or the like, and the adhesive can subsequently be easily de-bonded at room temperature under mild conditions; and a method for manufacturing a semiconductor device using the temporary-bonding adhesive. The present invention includes a temporary-bonding adhesive wherein a polyimide copolymer having at least an acid dianhydride residue and a diamine residue, the diamine residue including both of (A1) a polysiloxane-based diamine residue represented by a general formula (1) in which n is a natural number from 1 to 15, and (B1) a polysiloxane-based diamine residue represented by a general formula (1) in which n is a natural number from 16 to 100, the polyimide copolymer containing 40-99.99 mol % of the (A1) residue and 0.01-60 mol % of the (B1) residue.
1. A temporary-bonding adhesive, wherein the temporary-bonding adhesive is a polyimide copolymer having at least an acid dianhydride residue and a diamine residue, the diamine residue includes both of (A1) a polysiloxane-based diamine residue represented by a general formula (1) in which n is a natural number of 1 to 15, and (B1) a polysiloxane-based diamine residue represented by a general formula (1) in which n is a natural number of 16 to 100, and the polyimide copolymer contains 40 to 99.99 mol % of the (A1) residue and 0.01 to 60 mol % of the (B1) residue:
in which n is a natural number, R 1 and R 2 may be the same or different and represent an alkylene group having 1 to 30 carbon atoms or a phenylene group, and R 3 to R 6 may be the same or different and represent an alkyl group having 1 to 30 carbon atoms, a phenyl group, or a phenoxy group.
2. The temporary-bonding adhesive according to claim 1 , further comprising (c) a solvent.
3. The temporary-bonding adhesive according to claim 2 , wherein the (c) solvent contains a solvent having an SP value of 7.5 to 9.0.
4. The temporary-bonding adhesive according to claim 2 , wherein the (c) solvent contains a solvent represented by a general formula (6):
in which R 25 and R 26 independently represent hydrogen, alkyl groups having 1 to 12 carbon atoms, an acetyl group, or aromatic groups, R 27 represents hydrogen or a methyl group, b is either 0, 1 or 2, and c is an integer of 1 to 3.
5. The temporary-bonding adhesive according to claim 1 , further comprising inorganic particles.
6. An adhesive layer obtained by forming a coating of the temporary-bonding adhesive according to anyone of claim 1 .
7. A wafer work piece formed by bonding a semiconductor circuit formation substrate to a support substrate with at least the adhesive layer according to claim 6 interposed therebetween.
8. A method for manufacturing a semiconductor device using the wafer work piece according to claim 7 comprising at least any one of a step of fabricating the semiconductor circuit formation substrate into a thinner one, a step of subjecting the semiconductor circuit formation substrate of the wafer work piece to device processing, a step of de-bonding off the semiconductor circuit formation substrate of the wafer work piece from a support substrate, and a step of washing, with a solvent, an adhesive layer adhering to the semiconductor circuit formation substrate de-bonded off from the wafer work piece or the support substrate of the wafer work piece.
9. A method for manufacturing a semiconductor device, wherein the step of fabricating the semiconductor circuit formation substrate into a thinner one according to claim 8 comprises a step of fabricating a thickness of the semiconductor circuit formation substrate to at least 1 μm and at most 100 μm.
10. A wafer work piece formed by bonding a semiconductor circuit formation substrate to a support substrate with the adhesive layer according to claim 6 interposed therebetween.
11. A polyimide copolymer having at least an acid dianhydride residue and a diamine residue, wherein the diamine residue includes both of (A1) a polysiloxane-based diamine residue represented by a general formula (1) in which n is a natural number of 1 to 15, and (B1) a polysiloxane-based diamine residue represented by a general formula (1) in which n is a natural number of 16 to 100, and the polyimide copolymer contains 40 to 99.99 mol % of the (A1) residue and 0.01 to 60 mol % of the (B1) residue:
in which n is a natural number, R 1 and R 2 may be the same or different and represent an alkylene group having 1 to 30 carbon atoms or a phenylene group, and R 3 to R 6 may be the same or different and represent an alkyl group having 1 to 30 carbon atoms, a phenyl group, or a phenoxy group.