Method and system for transferring semiconductor devices from a wafer to a carrier structure
Embodiments of methods and system for transferring semiconductor devices from a wafer to a carrier structure are described. In one embodiment, a method for transferring semiconductor devices from a wafer to a carrier structure involves positioning a carrier structure with a bond surface extending in a first plane and transferring a semiconductor device from a wafer onto the bond surface of the carrier structure using a plurality of rotatable transfer assemblies. Centers of the rotatable transfer assemblies are positioned in parallel with the first plane.
1. A system for transferring semiconductor devices from a wafer to a carrier structure, the system comprising:
a carrier movement mechanism configured to position a carrier structure with a bond surface extending in a first plane;
a wafer holding device configured to hold the wafer and move the wafer perpendicularly to the first plane; and
a plurality of rotatable transfer assemblies configured to transfer a semiconductor device from the wafer onto the bond surface of the carrier structure, wherein centers of the rotatable transfer assemblies are in a same plane and the same plane is positioned in parallel with the first plane.
2. The system of claim 1 , wherein the rotatable transfer assemblies comprise a first rotatable transfer assembly and a second rotatable transfer assembly, wherein each of the first and second rotatable transfer assemblies comprises at least two transfer heads, and wherein the first rotatable transfer assembly is configured to:
rotate a transfer head of one of the at least two transfer heads to a pick-up position to pick up the semiconductor device from the wafer; and
rotate the transfer head to a flip position.
3. The system of claim 2 , wherein the first rotatable transfer assembly is configured to rotate the transfer head 180 degrees from the pick-up position to the flip position.
4. The system of claim 2 , further comprising an alignment device configured to check an alignment of the semiconductor device before the semiconductor device is picked up from the wafer in the pick-up position using the transfer head of the first rotatable transfer assembly.
5. The system of claim 2 , wherein the second rotatable transfer assembly is configured to:
rotate a transfer head to the flip position;
transfer the semiconductor device from the transfer head of the first rotatable transfer assembly to a transfer head of the two transfer heads of the second rotatable transfer assembly; and
rotate the transfer head of the second rotatable transfer assembly to place the semiconductor device onto the bond surface.
6. The system of claim 1 , further comprising an alignment device configured to check an alignment of the carrier structure before and after the semiconductor device is bonded at a bonding position on the bond surface of the carrier structure.