Semiconductor structure with sacrificial anode and method for forming
A packaged semiconductor device is made by forming a conductive pad on an external surface of an integrated circuit device, forming a passivation layer over the conductive pad, removing a portion of the passivation layer over a bond area on the conductive pad, forming a sacrificial anode around a majority of a periphery surrounding the bond area, forming a conductive bond in the bond area, and forming an encapsulating material around the conductive bond and an exposed portion of the sacrificial anode.
1. A packaged semiconductor device comprising:
a semiconductor wafer;
a conductive pad directly on a surface of the wafer;
a sacrificial material surrounding two or more peripheral edges of a bond area on the conductive pad;
a conductive bond in the bond area, wherein the sacrificial material is spaced apart from the conductive bond such that the sacrificial material is not in contact with the conductive bond; and
encapsulant material formed over and in direct contact with the conductive bond and in direct contact with the sacrificial material.
2. The device of claim 1 wherein the sacrificial material is formed of a first sacrificial layer and a second sacrificial layer, the first sacrificial layer forms a sacrificial spacer around a periphery of the conductive pad and the second sacrificial layer forms a sacrificial anode in contact with the surface of the conductive pad around the peripheral edges of the bond area.
3. The device of claim 1 further comprising:
a passivation layer formed adjacent to an exposed portion of the sacrificial material.
4. The device of claim 1 wherein the conductive pad is formed of aluminum and the conductive bond is formed of copper.
5. The device of claim 1 wherein the sacrificial layer has a higher redox potential than the conductive pad.
6. The device of claim 1 wherein the conductive bond is one of a group consisting of: a wire bond, a solder bump in a ball grid array, a copper bump, a copper pillar.
7. The device of claim 3 wherein:
the passivation layer includes an opening in which sidewalls of the opening are located directly over the conductive pad.
8. The device of claim 7 wherein the passivation layer comprises:
an undercut region in a portion of the sidewalls located wherein the undercut region is located directly over the conductive pad, and the sacrificial material is located in the undercut region and directly on the conductive pad.
9. The device of claim 8 wherein:
the passivation layer includes multiple layers, wherein the undercut region is located in sidewalls of at least one layer under a top layer of the multiple layers.
10. The device of claim 9 wherein:
the sacrificial material is aligned to sidewalls of the top layer of the multiple layers.
11. The device of claim 1 wherein:
the sacrificial material surrounds the conductive pad and is in physical contact with all sidewalls of the conductive pad.
12. The device of claim 11 further comprising:
a passivation layer between the semiconductor wafer and the encapsulant material wherein the passivation layer includes an opening in which sidewalls of the opening are located directly on the sacrificial material.
13. The device of claim 2 further comprising:
a passivation layer formed over the conductive pad and sacrificial material, wherein the sacrificial anode is located between the passivation layer and conductive pad, and the sacrificial spacer is located between the passivation layer and the semiconductor wafer.
14. A packaged semiconductor device comprising:
a semiconductor wafer;
an aluminum pad directly on a top surface of the wafer;
a sacrificial material surrounding two or more peripheral edges of a bond area on the aluminum pad, wherein the sacrificial layer has a higher redox potential than the aluminum pad;
a copper bond in the bond area, wherein the sacrificial material is spaced apart from the copper bond such that the sacrificial material is not in contact with the copper bond; and
encapsulant material formed over and in direct contact with the copper bond and in direct contact with the sacrificial material.
15. A packaged semiconductor device comprising:
a semiconductor wafer;
a conductive pad directly on a surface of the wafer;
a sacrificial material surrounding and in direct contact with two or more sidewalls of the conductive pad;
a conductive bond in a bond area of the conductive pad, wherein the sacrificial material is spaced apart from the conductive bond; and
encapsulant material formed over and in direct contact with the conductive bond and in direct contact with the sacrificial material.
16. The device of claim 15 wherein the sacrificial material is formed of a first sacrificial layer and a second sacrificial layer, the first sacrificial layer forms a sacrificial spacer surrounding and in direct contact with the two or more sidewalls of the conductive pad and the second sacrificial layer forms a sacrificial anode directly on the surface of the conductive pad around the peripheral edges of the bond area and in direct contact with the sacrificial spacer.
17. The device of claim 15 further comprising:
a passivation layer between the semiconductor wafer and the encapsulant material wherein the passivation layer includes an opening in which sidewalls of the opening are located directly on the sacrificial material.
18. The device of claim 16 further comprising:
a passivation layer over the conductive pad and sacrificial material, wherein the sacrificial anode is located between the passivation layer and conductive pad, and the sacrificial spacer is located between the passivation layer and the semiconductor wafer.
19. The device of claim 15 further comprising:
a passivation layer over the conductive pad having an opening in which sidewalls of the opening are located directly over the conductive pad.