Method for forming trench liner passivation
In a method for fabricating a semiconductor device, a trench is etched in a semiconductor substrate having a top surface, and a lining oxide layer is formed conformal to the trench. A negatively-charged liner covering the lining oxide layer and conformal to the trench is formed. The trench is partially filled with a flowable oxide to a level below the top surface of the semiconductor substrate, and the flowable oxide in the trench is cured. The negatively-charged liner above the cured flowable oxide is optionally removed. A silicon oxide is deposited in the remaining portion of the trench, and a planarization process is performed to remove excess portions of the silicon oxide over the top surface of the semiconductor substrate.
1. A method for fabricating a semiconductor device, the method comprising:
etching a trench in a semiconductor substrate having a top surface;
forming a lining oxide layer conformal to the trench;
forming a silicon nitride layer above the lining oxide and above the top surface of the semiconductor substrate;
forming a silicon-rich oxide (SRO) layer above the silicon nitride layer;
forming a negative charge liner covering the lining oxide layer and the SRO layer and conformal to the trench; and
filling the trench with a first oxide.
2. The method of claim 1 , wherein forming the negative charge liner comprises depositing the negative charge liner using a low temperature plasma assisted radical oxidation process, an atomic layer deposition process, or a plasma-assisted nitridation process.
3. The method of claim 1 , further comprising:
curing the first oxide; and
after curing the first oxide, removing the negative charge liner above the first oxide.
4. The method of claim 1 , wherein the semiconductor device is an image sensor or a logic device.
5. The method of claim 1 , wherein filling the trench with the first oxide includes partially filling the trench with a flowable oxide to a level below the top surface of the semiconductor substrate, the method further comprising:
curing the flowable oxide;
depositing a second oxide in the remaining portion of the trench; and
performing a planarization process to remove the second oxide, the SRO layer, and the silicon nitride layer over the top surface of the semiconductor substrate.
6. The method of claim 5 , wherein partially filling the trench with the flowable oxide comprises filling the trench with the flowable oxide using a spin on glass (SOG) or flowable chemical vapor deposition (FCVD) process.
7. The method of claim 5 , wherein depositing the second oxide in the remaining portion of the trench comprises depositing the second oxide using a high density plasma chemical vapor deposition (HDPCVD) process.
8. The method of claim 5 , wherein the planarization process is a chemical mechanical polish (CMP) process.
9. A method for fabricating a semiconductor device, the method comprising:
etching a trench in a semiconductor substrate;
forming a lining oxide layer that is conformal to the trench;
sequentially forming a silicon nitride layer and a silicon-rich oxide (SRO) layer on a top surface of the semiconductor substrate;
forming a negative charge liner that is conformal to the trench and that covers the lining oxide layer,
the silicon nitride layer, and the SRO layer;
forming a high-K dielectric liner that is conformal to the trench and that covers the negative charge liner;
partially filling the trench with a first oxide to a level below the top surface of the semiconductor substrate;
depositing a first oxide to a level below the top surface of the semiconductor substrate;
curing the flowable oxide in the trench;
depositing a silicon second oxide in the remaining portion of the trench; and performing a planarization process to remove the second oxide, the SRO layer, and the silicon nitride layer over the top surface of the semiconductor substrate.
10. The method of claim 9 , wherein forming the high-K dielectric liner comprises depositing the high-K dielectric liner using an atomic layer deposition (ALD) process.
11. The method of claim 9 , wherein forming the negative charge liner comprises depositing the negative charge liner using reaction gas of silane (SiH 4 ) and ammonia (NH 3 ) and using a low temperature plasma assisted radical oxidation process, an atomic layer deposition process, or a plasma-assisted nitridation process.
12. The method of claim 9 , further comprising:
curing the first oxide; and
after curing the first oxide, selectively etching the high-K dielectric liner above a surface of the first oxide.
13. The method of claim 9 , wherein partially filling the trench with the first oxide comprises filling the trench with a flowable oxide using a spin on glass (SOG) or flowable chemical vapor deposition (FCVD) process.
14. The method of claim 9 , wherein depositing the second oxide in the remaining portion of the trench comprises depositing the second oxide using a high density plasma chemical vapor deposition (HDPCVD) process.
15. The method of claim 9 , wherein the planarization process is a chemical mechanical polish (CMP) process.
16. A method for fabricating a semiconductor device, the method comprising:
providing a semiconductor substrate;
etching a trench in the semiconductor substrate;
forming a lining oxide layer that is conformal to the trench;
sequentially forming a silicon nitride layer and a silicon-rich oxide (SRO) layer on a top surface of the semiconductor substrate;
forming a negative charge liner that is conformal to the trench and that covers the lining oxide layer, the silicon nitride layer, and the SRO layer;
forming a high-K dielectric liner that is conformal to the trench and that covers the negative charge liner;
filling the trench with a first oxide; and
performing a planarization process to remove the nitride negative charge liner, the SRO layer, and the silicon nitride layer over the top surface of the semiconductor substrate.
17. The method of claim 16 , wherein forming the negative charge liner comprises depositing the negative charge liner using reaction gas of silane (SiH 4 ) and ammonia (NH 3 ) and using a low temperature plasma assisted radical oxidation process, an atomic layer deposition process, or a plasma-assisted nitridation process.
18. The method of claim 16 , wherein filling the trench with the first oxide includes partially filling the trench with a flowable oxide to a level below the top surface of the semiconductor substrate, the method further comprising:
curing the flowable oxide;
after curing the flowable oxide, selectively etching the high-K dielectric liner above a surface of the flowable oxide; and
depositing a second oxide in the remaining portion of the trench, wherein performing the planarization process includes removing the second oxide over the top surface of the semi conductor substrate.
19. The method of claim 18 , wherein selectively etching the high-K dielectric liner is performed using a dry etching that involves boron trichloride in argon.
20. The method of claim 18 , wherein partially filling the trench with the flowable oxide comprises filling the trench with the flowable oxide using a spin on glass (SOG) or flowable chemical vapor deposition (FCVD) process, and depositing the second oxide in the remaining portion of the trench comprises depositing the second oxide using a high density plasma chemical vapor deposition (HDPCVD) process.