Semiconductor memory device
A semiconductor memory device that includes at least a lower contact plug on a semiconductor substrate, a magnetic tunnel junction of the lower contact plug, and a barrier pattern on a sidewall of the lower contact plug may further include an insulation pattern on the sidewall of the lower contact plug. The insulation pattern may be between the barrier pattern and the magnetic tunnel junction pattern. The insulation pattern may include an upper portion and a lower portion whose width is greater than a width of the upper portion.
1. A semiconductor memory device, comprising:
a select element on a semiconductor substrate;
a magnetic tunnel junction pattern on the select element;
a lower contact plug connecting the select element to the magnetic tunnel junction pattern;
a barrier pattern covering a lower portion of a sidewall of the lower contact plug; and
an insulation pattern covering an upper portion of the sidewall of the lower contact plug, the insulation pattern being between the barrier pattern and the magnetic tunnel junction pattern, the insulation pattern including an upper portion and a lower portion, the lower portion having a greater width than a width of the upper portion, the barrier pattern including a first material, the insulation pattern including a second material different from the first material,
wherein the magnetic tunnel junction pattern includes
a bottom electrode on the lower contact plug,
a top electrode,
first and second magnetic layers between the top and bottom electrodes, and
a tunnel barrier layer between the first and second magnetic layers, and
wherein the lower contact plug includes an upper portion connected to the bottom electrode, the upper portion of the lower contact plug having a smaller width than a width of the bottom electrode.
2. The semiconductor memory device of claim 1 , wherein the insulation pattern horizontally protrudes from a sidewall of the barrier pattern.
3. The semiconductor memory device of claim 1 , wherein the insulation pattern includes a sidewall, the sidewall of the insulation pattern being substantially coplanar with a sidewall of the barrier pattern.
4. The semiconductor memory device of claim 1 , wherein the magnetic tunnel junction pattern includes a sidewall connected to a sidewall of the insulation pattern such that a sidewall of the barrier pattern and the sidewall of the insulation pattern are separate portions of a common, continuous surface.
5. The semiconductor memory device of claim 1 , further comprising:
a plurality of lower contact plugs; and
an insulation layer between adjacent lower contact plugs of the plurality of lower contact plugs, the insulation layer including a top surface, the top surface of the insulation layer being at least partially at a lower elevation than a bottom surface of the insulation pattern, relative to the semiconductor substrate.
6. The semiconductor memory device of claim 5 , wherein the insulation pattern and the insulation layer include a common material.
7. The semiconductor memory device of claim 1 , wherein the lower contact plug includes,
a first part having a top surface, the top surface of the first part being substantially coplanar with a top surface of the barrier pattern; and
a second part having a top surface, the top surface of the second part being elevated above the top surface of the first part.
8. The semiconductor memory device of claim 1 , wherein the magnetic tunnel junction pattern at least partially exposes at least one top surface of the barrier pattern.
9. The semiconductor memory device of claim 8 , wherein the magnetic tunnel junction pattern at least partially exposes at least one top surface of the lower contact plug.