Fractal-edge thin film and method of manufacture
A method of manufacturing a fractal-edge thin film includes determining an area shape to be covered by the fractal-edge thin film. The method also includes generating a thin-film perimeter based upon the area shape, the thin-film perimeter having a fractal dimension exceeding one. The method also includes determining a photomask perimeter such that a photomask with the photomask perimeter, when used in a photolithography process, yields a fractal-edge thin film with the thin-film perimeter. The method may also include photolithographically etching a thin-film, the thin film having a photoresist layer disposed thereon, the photoresist layer having been exposed through the photomask, wherein the etching results in the fractal-edge thin film.
1. A method of manufacturing a fractal-edge thin film, comprising:
disposing a thin film on a substrate of an image sensor, the substrate having a plurality of light-sensing elements configured to detect light incident on a surface of the substrate; and
photolithographically etching the thin film, the thin film having a photoresist layer disposed thereon, the photoresist layer having been exposed through a photomask having a photomask perimeter that has a fractal dimension exceeding one.
2. The method of claim 1 , further comprising, after the step of etching, stripping remaining photoresist from the fractal-edge thin film.
3. The method of claim 1 , further comprising exposing the photoresist layer through the photomask.