Wafer level chip scale package structure and manufacturing method thereof
A wafer level chip scale package (WLCSP) structure and a manufacturing method are disclosed. The WLCSP structure comprises a semiconductor die and a stack. The stack comprises a protective tape and a molding compound. A portion of a first interface surface between the molding compound and the protective tape is curved. The manufacturing method comprises the steps of forming a semiconductor structure; attaching the semiconductor structure on a dummy wafer; performing a first dicing process using a first cutting tool; depositing a molding compound; removing the dummy wafer; performing a second dicing process with a second cutting tool. A first aperture of the first cutting tool is larger than a second aperture of the second cutting tool. The portion of the first interface surface being curved reduces the possibility of generation of cracks in the WLCSP structure.
1. A wafer level chip scale package (WLCSP) structure comprising:
a semiconductor die;
a stack comprising:
a protective tape; and
a molding compound;
wherein the semiconductor die is packaged in between the protective tape and the molding compound;
wherein a portion of a first interface surface between the molding compound and the protective tape is curved; and
wherein the first interface surface between the molding compound and the protective tape extends to an edge face of the semiconductor die.
2. The WLCSP structure of claim 1 , wherein a portion of a second interface surface between the molding compound and the semiconductor die is curved.
3. The WLCSP structure of claim 1 further comprising:
a connection member electrically connected to the semiconductor die;
wherein a top surface of the connection member exposes from the molding compound so as to electrically connect the semiconductor die to external components.
4. The WLCSP structure of claim 3 , wherein the connection member comprises a metal pillar and a solder bump, the metal pillar being electrically connected to the semiconductor die, and the solder bump being stacked on a top surface of the metal pillar.
5. The WLCSP structure of claim 4 , wherein the semiconductor die comprises
a substrate; and
a passivation layer above a top surface of the substrate;
an upper portion of the metal pillar being surrounded by the molding compound;
a lower portion of the metal pillar passing through an opening of the passivation layer; and
the metal pillar being electrically connected to the substrate.
6. The WLCSP structure of claim 5 , wherein the semiconductor die further comprises a second metal layer in between the substrate and the passivation layer;
wherein the metal pillar being directly connected to a top surface of the second metal layer.
7. The WLCSP structure of claim 6 , wherein the semiconductor die further comprises a first metal layer directly attached to a bottom surface of the substrate;
wherein a bottom surface of the first metal layer is directly attached to a top surface of the protective tape; and
wherein sidewalls of the first metal layer connect to the molding compound.
8. The WLCSP structure of claim 7 , wherein a portion of an interface surface between the molding compound and the first metal layer is curved; a portion of an interface surface between the molding compound and the substrate is curved; a portion of an interface surface between the molding compound and the second metal layer is curved; and a portion of an interface surface between the molding compound and the passivation layer is curved.
9. The WLCSP structure of claim 8 , wherein the first metal layer comprises a material selected from the group consisting of titanium, nickel and silver;
the substrate comprises silicon;
the second metal layer comprises aluminum; and
the metal pillar comprises copper.
10. The WLCSP structure of claim 1 , wherein the portion of the first interface surface is an arc-shaped interface surface.
11. The WLCSP structure of claim 10 , wherein the arc-shaped interface surface has a constant radius of curvature.
12. The WLCSP structure of claim 10 , wherein the arc-shaped interface surface has a progressive changing of radii of curvatures from a first end to a second end of the arc-shaped interface surface.
13. The WLCSP structure of claim 1 , wherein a sidewall of the protective tape and a sidewall of the molding compound are co-planar and wherein the sidewall of the protective tape is exposed from the sidewall of the molding compound.
14. The WLCSP structure of claim 1 ,
wherein the semiconductor die comprises
a first metal layer;
a substrate;
a second metal layer; and
a passivation layer;
wherein the WLCSP structure further comprises a connection member;
wherein the connection member comprises
a metal pillar; and
a solder bump;
wherein a bottom surface of the first metal layer is directly attached to a top surface of the protective tape;
wherein a bottom surface of the substrate is directly attached to a top surface of the first metal layer;
wherein a bottom surface of the second metal layer is directly attached to a top surface of the substrate;
wherein a bottom surface of the passivation layer is directly attached to a top surface of the second metal layer;
wherein an upper portion of the metal pillar being surrounded by the molding compound;
wherein a lower portion of the metal pillar passing through an opening of the passivation layer;
wherein a bottom surface of the metal pillar is directly attached to the top surface of the second metal layer;
wherein the metal pillar is electrically connected to the substrate;
wherein the solder bump is exposed from the molding compound; and
wherein a bottom surface of the solder bump is directly attached to a top surface of the metal pillar.
15. The WLCSP structure of claim 14 , wherein the top surface of the metal pillar is higher than the top surface of the passivation layer and wherein the bottom surface of the metal pillar is coplanar with the bottom surface of the passivation layer.
16. The WLCSP structure of claim 14 , wherein the second metal layer has a recess to receive the metal pillar.
17. The WLCSP structure of claim 14 , wherein the metal pillar is a single-piece construction.
18. The WLCSP structure of claim 1 , wherein the protective tape and the molding compound are made of a same material.
19. A wafer level chip scale package (WLCSP) structure comprising:
a semiconductor die comprising:
a substrate; and
a passivation layer above a top surface of the substrate;
a first metal layer directly attached to a bottom surface of the substrate; and
a second metal layer in between the substrate and the passivation layer;
a stack comprising:
a protective tape; and
a molding compound;
wherein the semiconductor die is packaged in between the protective tape and the molding compound; and
wherein a portion of a first interface surface between the molding compound and the protective tape is curved; and
wherein a portion of an interface surface between the molding compound and the first metal layer is curved; a portion of an interface surface between the molding compound and the substrate is curved; a portion of an interface surface between the molding compound and the second metal layer is curved; and a portion of an interface surface between the molding compound and the passivation layer is curved.