IP Library › Granted Patent US 10,269,995
Granted Patent B2
US 10,269,995 · App. 15/622,422 · Granted Apr 23, 2019

Screen printing electrical contacts to nanostructured areas

Inventors: Michael Jura (Santa Monica, CA); Marcie R. Black (Lincoln, MA); Jeffrey B. Miller (Brookline, MA); Joanne Yim (San Francisco, CA); Joanne Forziati (Everett, MA); Brian P. Murphy (Revere, MA); Richard Chleboski (Medway, MA)
Assignee: Advanced Silicon Group, Inc.
H01L31/02363B82Y30/00H01L31/02167H01L31/022425H01L31/022433H01L31/0312H01L31/03682H01L31/03762H01L31/035227H01L31/1868H01L29/0673Y02E10/50
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Quick Facts
Patent No.
US 10,269,995
App. No.
15/622,422
Granted
Apr 23, 2019
Kind
B2
Abstract

A process is provided for contacting a nanostructured surface. The process may include (a) providing a substrate having a nanostructured material on a surface, (b) passivating the surface on which the nanostructured material is located, (c) screen printing onto the nanostructured surface and (d) firing the screen printing ink at a high temperature. In some embodiments, the nanostructured material compromises silicon. In some embodiments, the nanostructured material includes silicon nanowires. In some embodiments, the nanowires are around 150 nm, 250 nm, or 400 nm in length. In some embodiments, the nanowires have a diameter range between about 30 nm and about 200 nm. In some embodiments, the nanowires are tapered such that the base is larger than the tip. In some embodiments, the nanowires are tapered at an angle of about 1 degree, about 3 degrees, or about 10 degrees. In some embodiments, a high temperature can be approximately 700 C, 750 C, 800 C, or 850 C.

Claims (32)

1. A silicon nanostructured device comprising:

a non-nanostructured substrate;

a nanostructured area disposed on and contacting a surface of the substrate;

a passivating layer coating the nanostructured area, the passivating layer comprising one of aluminum oxide, silicon dioxide, or silicon nitride;

a first contact comprising a comb-like pattern of metal directly contacting the nanostructured area;

a p-n junction below the nanostructured area; and

a second metal contact in electrical contact with the substrate.

2. The silicon nanostructured device of claim 1 , wherein the device is configured to be suitable for use as a solar cell.

3. The silicon nanostructured device of claim 1 , wherein the passivating layer coating the nanostructured area comprises silicon nitride.

4. The silicon nanostructured device of claim 1 , wherein lengths of nanostructures in the nanostructured area are between about 150 nm and about 400 nm.

5. The silicon nanostructured device of claim 4 , wherein the nanostructures in the nanostructured area have cross-sectional diameters between about 30 nm and about 200 nm.

6. The silicon nanostructured device of claim 1 , wherein one third to one half of a volume of the nanostructured area is silicon.

7. The silicon nanostructured device of claim 1 , wherein nanostructures in the nanostructured areas are tapered such that bases of the nanostructures on average have larger diameters than tips of the nanostructures.

8. The silicon nanostructured device of claim 1 , wherein the non-nanostructured substrate consists of polycrystalline silicon.

9. The silicon nanostructured device of claim 1 , wherein one of the first contact or the second contact comprises silver.

10. The silicon nanostructured device of claim 9 , wherein the second metal contact comprises aluminum.

11. A silicon nanostructured device comprising:

a non-nanostructured substrate;

a nanostructured area disposed on and contacting a surface of the substrate;

a passivating layer coating on the nanostructured area, the passivating layer comprising one of aluminum oxide, silicon dioxide, or silicon nitride;

a first contact comprising a comb-like pattern of metal directly contacting the nanostructured area;

a second contact in electrical contact with the substrate; and

a p-n junction below the nanostructured area.

12. The silicon nanostructured device of claim 11 , wherein at least one of the first contact or the second contact is fired at high temperature.

13. The silicon nanostructured device of claim 12 , wherein the high temperature is in a range of about 700° C. to about 900° C.

14. The silicon nanostructured device of claim 13 , wherein the high temperature is in a range of about 775° C. to about 825° C.

15. The silicon nanostructured device of claim 12 , wherein the device is heat dried before firing at high temperature.

16. The silicon nanostructured device of claim 15 , wherein the device is heat dried at a temperature in a range of about 100° C. to about 200° C. before firing at high temperature.

17. The silicon nanostructured device of claim 11 , wherein the non-nanostructured substrate comprises n-type silicon.

18. The silicon nanostructured device of claim 11 , wherein the non-nanostructured substrate comprises silicon having a resistivity of around 1 ohm-cm.

19. The silicon nanostructured device of claim 18 , wherein the non-nanostructured substrate comprises n-type silicon.

20. The silicon nanostructured device of claim 19 , wherein the non-nanostructured substrate has a (100) crystallographic orientation.

Assignments (5)
BILL OF SALE Recorded Jun 8, 2021
From: BANDGAP ENGINEERING, INC.
To: ADAMS, TRACY; DANE SHULMAN ASSOCIATES, LLC; CHLEBOSKI, RICHARD; MASSACHUSETTS GREEN ENERGY FUND I LP; NEW ENTERPRISE ASSOCIATES 12, LP; SHAW, ROBERT W., JR.; BLACK, MARCIE R.
Reel/Frame 056520/0829 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 22, 2020
From: ADVANCED SILICON GROUP, INC.
To: ADVANCED SILICON GROUP TECHNOLOGIES, LLC
Reel/Frame 054143/0197 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 14, 2017
From: JURA, MICHAEL; BLACK, MARCIE R.; MILLER, JEFFREY B.; YIM, JOANNE; FORZIATI, JOANNE; MURPHY, BRIAN P.; CHLEBOSKI, RICHARD
To: BANDGAP ENGINEERING, INC.
Reel/Frame 042710/0083 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 14, 2017
From: BLACK, MARCIE R.; NEW ENTERPRISE ASSOCIATES 12, LP; MASSACHUSETTS GREEN ENERGY FUND I LP; ADAMS, TRACY; CHLEBOSKI, RICHARD; SHAW, ROBERT W., JR.; DANE SHULMAN ASSOCIATES, LLC
To: ADVANCED SILICON GROUP, INC.
Reel/Frame 042710/0147 →
BILL OF SALE Recorded Jun 14, 2017
From: BANDGAP ENGINEERING, INC.
To: MARCIE BLACK; ADAMS, TRACY; DANE SHULMAN ASSOCIATES, LLC; CHLEBOSKI, RICHARD; MASSACHUSETTS GREEN ENERGY FUND I LP; NEW ENTERPRISE ASSOCIATES 12, LP; SHAW, ROBERT W., JR.
Reel/Frame 042809/0948 →
Continuity (4)
Continuation 14338752 · Jul 23, 2014
Continuation PCTUS2013025958 · Feb 13, 2013
Provisional Application 61598717 · Feb 14, 2012
Related Publication 20170278988A1 · Sep 28, 2017