Aerosol coating method and plasma-resistant member formed by the same
According to an aerosol coating method, a heat treatment process of preliminary ceramic particles having a first mean particle size (D 50 ) is performed to form ceramic particles having a second mean particle size (D 50 ) in micro unit larger than the first mean particle size. Thereafter, the ceramic particles are mixed with a carrier gas to form an aerosol. The aerosol is sprayed toward the base to form a ceramic coating film on the base.
1. An aerosol coating method comprising:
performing a heat treatment process of preliminary ceramic particles having a first mean particle size (D 50 ) to form ceramic particles having a second mean particle size (D 50 ) larger than the first mean particle size;
mixing the ceramic particles with a carrier gas to form an aerosol; and
spraying the aerosol toward a base to form a ceramic coating film on the base,
wherein the heat treatment process comprises a multi-stage heating section, a temperature maintenance section, and a cooling section,
and the multi-stage heating section sequentially comprises a first heating section, a pause section, and a second heating section, and the second heating section has a temperature increase rate lower than that of the first heating section.
2. The aerosol coating method of claim 1 , wherein the second mean particle size (D 50 ) has a range of 4.5-12.0 μm.
3. The aerosol coating method of claim 1 , wherein the heat treatment process is performed at a temperature ranging from 500° C. to 1,400° C.
4. The aerosol coating method of claim 3 , wherein the heat treatment process is performed at a temperature ranging from 1,000° C. to 1,200° C.
5. The aerosol coating method of claim 1 , wherein the temperature maintenance section has a maintenance time in a range of 1-5 hours.
6. The aerosol coating method of claim 1 , wherein the cooling section has a cooling rate not higher than 270° C./hour.