Conformal transfer doping method for fin-like field effect transistor
Doping techniques for fin-like field effect transistors (FinFETs) are disclosed herein. An exemplary method includes forming a fin structure, forming a doped amorphous layer over a portion of the fin structure, and performing a knock-on implantation process to drive a dopant from the doped amorphous layer into the portion of the fin structure, thereby forming a doped feature. The doped amorphous layer includes a non-crystalline form of a material. In some implementations, the knock-on implantation process crystallizes at least a portion of the doped amorphous layer, such that the portion of the doped amorphous layer becomes a part of the fin structure. In some implementations, the doped amorphous layer includes amorphous silicon, and the knock-on implantation process crystallizes a portion of the doped amorphous silicon layer.
1. A method comprising:
forming a fin structure;
forming a doped amorphous layer over a portion of the fin structure; and
performing a knock-on implantation process to drive a dopant from the doped amorphous layer into the portion of the fin structure, thereby forming a doped feature, wherein the knock-on implantation process converts at least a portion of the doped amorphous layer into a crystalline material, such that the portion of the doped amorphous layer becomes a part of the fin structure.
2. The method of claim 1 , wherein the fin structure includes silicon and the doped amorphous layer includes amorphous silicon, and further wherein the knock-on implantation process crystallizes at least a portion of the amorphous silicon.
3. The method of claim 1 , further comprising performing a fin trimming process to reduce a dimension of the fin structure before forming the doped amorphous layer.
4. The method of claim 3 , wherein a thickness of the doped amorphous layer is about equal to a thickness of the fin structure removed during the fin trimming process, and further wherein the knock-on implantation process causes the doped amorphous layer to become a part of the fin structure.
5. The method of claim 1 , further comprising:
oxidizing a remaining portion of the doped amorphous layer; and
removing the oxidized portion of the doped amorphous layer.
6. The method of claim 1 , wherein the doped amorphous layer is formed on a source region and a drain region of the fin structure, and the doped feature is a lightly doped source and drain (LDD) region disposed in the source region and the drain region of the fin structure.
7. The method of claim 6 , further comprising forming a gate structure over a channel region of the fin structure before forming the doped amorphous layer.
8. The method of claim 1 , wherein the knock-on implantation process uses argon ions to drive the dopant from the doped amorphous layer into the portion of the fin structure.
9. The method of claim 1 , wherein the knock-on implantation process converts the entire doped amorphous layer into a crystalline material such that no portion of the doped amorphous layer remains after the performing of the knock-on implantation process.
10. A method comprising:
forming a fin structure;
forming a doped amorphous silicon layer over a portion of the fin structure; and
performing a knock-on implantation process to drive a dopant from the doped amorphous silicon layer into the portion of the fin structure, thereby forming a doped feature, wherein the knock-on implantation process crystallizes at least a portion of the doped amorphous silicon layer.
11. The method of claim 10 , further comprising reducing a width of the fin structure before forming the doped amorphous silicon layer.
12. The method of claim 11 , wherein a thickness of the doped amorphous silicon layer is about equal to an amount of the fin structure removed when reducing the width of the fin structure, and further wherein the knock-on implantation process causes the doped amorphous silicon layer to become a part of the fin structure.
13. The method of claim 10 , wherein the knock-on implantation process causes the portion of the doped amorphous silicon layer to become a part of the fin structure, the method further comprising:
oxidizing a remaining portion of the doped amorphous silicon layer; and
removing the oxidized portion of the doped amorphous silicon layer.
14. The method of claim 10 , wherein the doped amorphous silicon layer wraps a source region and a drain region of the fin structure, and the doped feature is a lightly doped source and drain (LDD) region disposed in the source region and the drain region.
15. The method of claim 10 , wherein the forming the doped amorphous silicon layer includes epitaxially growing a semiconductor material over the portion of the fin structure, wherein the semiconductor material is in situ doped during the epitaxially growing.
16. A method comprising:
forming a fin structure, wherein the fin structure includes a channel region defined between a source region and a drain region;
forming a gate structure over the channel region of the fin structure;
forming a doped layer over the source region and the drain region of the fin structure, wherein the doped layer includes a material having a non-crystalline structure; and
performing a knock-on implantation process to drive a dopant from the doped layer into the source region and the drain region of the fin structure, wherein the knock-on implantation process converts a portion of the doped layer into the material having a crystalline structure.
17. The method of claim 16 , wherein the knock-on implantation process forms a lightly doped source and drain (LDD) region, wherein a doped portion of the fin structure and at least a portion of the doped layer form the LDD region.
18. The method of claim 17 , further comprising performing a fin trimming process to reduce a dimension of the source region and the drain region of the fin structure before forming the doped layer, wherein all of the doped layer becomes a part of the LDD region.
19. The method of claim 17 , further comprising removing any remaining portion of the doped layer.
20. The method of claim 16 , wherein the doped layer includes amorphous silicon, and further wherein the knock-on implantation process crystallizes at least a portion of the amorphous silicon.