Two-dimensional self-aligned super via integration on self-aligned gate contact
Techniques relate to contacts for semiconductors. First gate contacts are formed on top of first gates, second gate contacts are on second gates, and terminal contacts are on silicide contacts. First gate contacts and terminal contacts are recessed to form a metal layer on top. Second gate contacts are recessed to be separately on each of the second gates. Filling material is formed on top of the recessed second gate contacts and metal layer. An upper layer is on top of the filling material. First metal vias are formed through filling and upper layers down to metal layer over first gate contacts. Second metal vias are formed through filling and upper layers down to metal layer over terminal contacts. Third metal vias are formed through filling and upper layers down to recessed second gate contacts over second gates. Third metal vias are taller than first.
1. A method of forming contacts for a semiconductor device, the method comprising:
forming gate contacts on top of gates, such that a top portion of the gate contacts are merged across adjacent gates of the gates;
recessing the gate contacts to remove the top portion of the gate contacts merging the adjacent gates of the gates, such that recessed gate contacts are separately on top of each of the gates, wherein each of the recessed gate contacts are separated from one another by a dielectric layer;
forming a filling material on top of the recessed gate contacts;
forming an upper layer on top of the filling material; and
forming metal vias on top of the recessed gate contacts over the gates, according to a via pattern through the filling material and the upper layer down to the recessed gate contacts.
2. The method of claim 1 , further comprising forming other gate contacts on top of other gates.
3. The method of claim 2 , further comprising recessing the other gate contacts in order to form a metal layer on top of the other gate contacts.
4. The method of claim 3 , further comprising forming other metal vias on top of the metal layer over the other gate contacts, according to another via pattern through the filling material and the upper layer down to the metal layer on top of the other gate contacts.
5. The method of claim 4 , wherein the metal vias are taller than the other metal vias.
6. The method of claim 1 , wherein the other metal vias comprises tungsten.
7. The method of claim 1 , wherein the other metal vias comprises copper.
8. The method of claim 1 , wherein the other metal vias comprises cobalt.
9. The method of claim 1 , wherein the metal vias comprises tungsten.
10. The method of claim 1 , wherein the metal vias comprises copper.
11. The method of claim 1 , wherein the metal vias comprises cobalt.
12. The method of claim 1 , wherein the gates are high-κ metal gates.
13. The method of claim 1 , wherein the gates include a high-κ material.
14. The method of claim 1 , wherein the gates includes hafnium dioxide, zirconium dioxide, and titanium dioxide.
15. The method of claim 1 , wherein the gates comprise first gates and second gates.
16. The method of claim 15 , wherein the gate contacts comprise first gate contacts and second gate contacts.
17. The method of claim 1 , wherein the metal vias comprise first metal vias, second metal vias, and third metal vias.
18. The method of claim 17 , wherein a height of the third metal vias corresponds to a thickness of the filling material.
19. The method of claim 17 , wherein a height of the third metal vias ranges from about 60-100 nanometers.
20. The method of claim 17 , wherein a height of the first metal vias ranges from about 10-40 nanometers.