Piezoelectric sensor
The present disclosure provides a highly sensitive piezoelectric sensor in which mixing of electromagnetic noise into signals output from a piezoelectric device is suppressed. The present disclosure provides a piezoelectric sensor including a piezoelectric device which includes a piezoelectric film having an insulating film and a piezoelectric layer stacked on one principal surface of the insulating film and a signal electrode layer stacked on one principal surface of the piezoelectric film, an amplifier electrically connected to the signal electrode layer, and a shield member which is not electrically connected to the signal electrode layer and is composed of a grounded conductor, wherein the piezoelectric film, the signal electrode layer, and the amplifier are accommodated inside the shield member.
1. A piezoelectric sensor comprising:
a piezoelectric device including a piezoelectric film and a signal electrode layer, wherein the piezoelectric film has an insulating film and a piezoelectric layer stacked on the insulating film, and wherein the signal electrode layer is stacked on one surface of the piezoelectric film;
an amplifier electrically connected to the signal electrode layer; and
a shield member not electrically connected to the signal electrode layer and composed of a ground electrode layer and an amplifier case, wherein the ground electrode layer is stacked on another surface of the piezoelectric film opposite to the one surface of the piezoelectric film,
wherein the piezoelectric film and the signal electrode layer are accommodated inside the ground electrode layer, and the amplifier is accommodated inside the amplifier case.
2. The piezoelectric sensor according to claim 1 , wherein the amplifier case is not electrically connected to the signal electrode layer and composed of a grounded conductor,
wherein the ground electrode layer is not electrically connected to the signal electrode layer and composed of a grounded conductor.
3. The piezoelectric sensor according to claim 2 ,
wherein the amplifier is stacked on the piezoelectric device at a side opposite to the piezoelectric film when viewed from the signal electrode layer, and
wherein the ground electrode layer has an opening or a notch for electrically connecting the signal electrode layer to the amplifier.
4. The piezoelectric sensor according to claim 3 , wherein the amplifier is stacked on the piezoelectric device through a printed circuit board interposed therebetween.
5. The piezoelectric sensor according to claim 4 ,
wherein the printed circuit board has, at a side of a principal surface of the printed circuit board facing to the piezoelectric device,
a signal input terminal electrically connected to the signal electrode layer and
a ground input terminal electrically connected to the ground electrode layer, and
wherein the signal input terminal is surrounded by the ground input terminal in an in-plane direction of the principal surface of the printed circuit board.