IP Library Granted Patent US 10,319,723
Granted Patent B2
US 10,319,723 · App. 15/722,016 · Granted Jun 11, 2019

Semiconductor device

Inventor: Kiyoshi Kato (Kanagawa, JP)
Assignee: Semiconductor Energy Laboratory Co., Ltd.
H01L27/1052H01L27/0688H01L27/10805H01L27/1156H01L27/11521H01L27/11551H01L27/1203G11C16/0433G11C16/08G11C16/10G11C16/26
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Quick Facts
Patent No.
US 10,319,723
App. No.
15/722,016
Granted
Jun 11, 2019
Kind
B2
Abstract

An object is to provide a semiconductor device with a novel structure in which stored data can be held even when power is not supplied and there is no limit on the number of write operations. The semiconductor device includes a first memory cell including a first transistor and a second transistor, a second memory cell including a third transistor and a fourth transistor, and a driver circuit. The first transistor and the second transistor overlap at least partly with each other. The third transistor and the fourth transistor overlap at least partly with each other. The second memory cell is provided over the first memory cell. The first transistor includes a first semiconductor material. The second transistor, the third transistor, and the fourth transistor include a second semiconductor material.

Claims (57)

1. A semiconductor device comprising:

a substrate provided with a driver circuit, the substrate comprising single crystal silicon;

a first insulating layer over the substrate;

a first transistor over the first insulating layer;

a second insulating layer over the first transistor; and

a second transistor over the second insulating layer,

wherein the driver circuit comprise a third transistor comprising the single crystal silicon,

wherein each of the first transistor and the second transistor comprises a channel formation region, the channel formation region comprising an oxide semiconductor,

wherein a top surface of a gate of the first transistor is directly connected to a bottom surface of one of a source and a drain of the second transistor, and

wherein the first transistor and the second transistor are at least partially overlapped with each other.

2. The semiconductor device according to claim 1 , wherein one of a source and a drain of the first transistor is electrically connected to the other one of the source and the drain of the second transistor.

3. The semiconductor device according to claim 1 , wherein the gate of the first transistor is in contact with the one of the source and the drain of the second transistor.

4. The semiconductor device according to claim 1 , wherein the driver circuit comprises a selector circuit.

5. The semiconductor device according to claim 1 , wherein the oxide semiconductor comprises indium.

6. The semiconductor device according to claim 1 , wherein the oxide semiconductor contains hydrogen at a concentration lower than or equal to 5×10 19 atoms/cm 3 .

7. The semiconductor device according to claim 1 , wherein the oxide semiconductor contains carriers at a concentration lower than or equal to 1×10 12 /cm 3 .

8. The semiconductor device according to claim 1 , wherein off-state current per micrometer of a channel width of the second transistor is lower than or equal to 100 zA at room temperature.

9. A semiconductor device comprising:

a substrate provided with a driver circuit, the substrate comprising single crystal silicon;

a first insulating layer over the substrate;

a first transistor over the first insulating layer;

a second insulating layer over the first transistor;

a second transistor over the second insulating layer; and

a capacitor electrically connected to the first transistor and the second transistor,

wherein the driver circuit comprise a third transistor comprising the single crystal silicon,

wherein each of the first transistor and the second transistor comprises a channel formation region, the channel formation region comprising an oxide semiconductor,

wherein a gate of the first transistor is directly connected to one of a source and a drain of the second transistor,

wherein the capacitor overlaps with the first transistor, and

wherein the first transistor and the second transistor are at least partially overlapped with each other.

10. The semiconductor device according to claim 9 , wherein one of a source and a drain of the first transistor is electrically connected to the other one of the source and the drain of the second transistor.

11. The semiconductor device according to claim 9 , wherein the gate of the first transistor is in contact with the one of the source and the drain of the second transistor.

12. The semiconductor device according to claim 9 , wherein the driver circuit comprises a selector circuit.

13. The semiconductor device according to claim 9 , wherein the oxide semiconductor comprises indium.

14. The semiconductor device according to claim 9 , wherein the oxide semiconductor contains hydrogen at a concentration lower than or equal to 5×10 19 atoms/cm 3 .

15. The semiconductor device according to claim 9 , wherein the oxide semiconductor contains carriers at a concentration lower than or equal to 1×10 12 /cm 3 .

16. The semiconductor device according to claim 9 , wherein off-state current per micrometer of a channel width of the second transistor is lower than or equal to 100 zA at room temperature.

17. The semiconductor device according to claim 9 , wherein part of the one of the source and the drain of the second transistor is a first electrode of the capacitor.

18. A semiconductor device comprising:

a substrate provided with a driver circuit, the substrate comprising single crystal silicon;

a first insulating layer over the substrate;

a first transistor over the first insulating layer;

a second insulating layer over the first transistor;

a second transistor over the second insulating layer; and

a capacitor electrically connected to the first transistor and the second transistor with a first electrode of the capacitor,

wherein the driver circuit comprise a third transistor comprising the single crystal silicon,

wherein each of the first transistor and the second transistor comprises a channel formation region, the channel formation region comprising an oxide semiconductor,

wherein a gate of the first transistor is directly connected to one of a source and a drain of the second transistor,

wherein the first electrode of the capacitor overlaps with the gate of the first transistor, and

wherein the first transistor and the second transistor are at least partially overlapped with each other.

19. The semiconductor device according to claim 18 , wherein one of a source and a drain of the first transistor is electrically connected to the other one of the source and the drain of the second transistor.

20. The semiconductor device according to claim 18 , wherein the gate of the first transistor is in contact with the one of the source and the drain of the second transistor.

21. The semiconductor device according to claim 18 , wherein the driver circuit comprises a selector circuit.

22. The semiconductor device according to claim 18 , wherein the oxide semiconductor comprises indium.

23. The semiconductor device according to claim 18 , wherein the oxide semiconductor contains hydrogen at a concentration lower than or equal to 5×10 19 atoms/cm 3 .

24. The semiconductor device according to claim 18 , wherein the oxide semiconductor contains carriers at a concentration lower than or equal to 1×10 12 /cm 3 .

25. The semiconductor device according to claim 18 , wherein off-state current per micrometer of a channel width of the second transistor is lower than or equal to 100 zA at room temperature.

26. The semiconductor device according to claim 18 , wherein part of the one of the source and the drain of the second transistor is the first electrode of the capacitor.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 20, 2017
From: KATO, KIYOSHI
To: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Reel/Frame 044182/0657 →
Priority Claims (1)
JP 2010-152021 · Jul 2, 2010 · national
Continuity (4)
Continuation 14162837 · Jan 24, 2014
Continuation 13767904 · Feb 15, 2013
Continuation 13169544 · Jun 27, 2011
Related Publication 20180090499A1 · Mar 29, 2018
Cited By (4)
US 12,381,187 US 12,382,723 US 12,495,615 US 12,550,447