IP Library › Granted Patent US 10,323,321
Granted Patent B1
US 10,323,321 · App. 14/990,889 · Granted Jun 18, 2019

Thermal chemical vapor deposition process and coated article

Inventors: Min Yuan (State College, PA); Paul H. Silvis (Port Matilda, PA); James B. Mattzela (Port Matilda, PA)
Assignee: SILCOTEK CORP.
C23C16/24C23C16/44
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Quick Facts
Patent No.
US 10,323,321
App. No.
14/990,889
Granted
Jun 18, 2019
Kind
B1
Abstract

Thermal chemical vapor deposition processes and coated articles are disclosed. The coated article includes a surface having a surface impurity and a coating on the surface formed by thermally reacting a gas. In comparison to a comparable coating without the surface impurity, the coating on the surface has substantially the same level of adhesion, corrosion resistance over 24 hours in 6M HCl, corrosion resistance over 72 hours in NaClO, and electrochemical impedance spectroscopy results. Additionally or alternatively, the surface impurity has properties that reduce or eliminate adhesion of a comparative coating produced by decomposition of silane on a comparative surface following exposure of the surface to a temperature.

Claims (13)

1. A coated article, comprising:

a metal substrate, the metal substrate including stainless steel or aluminum; and

a coating on the metal substrate formed by thermally reacting a gas;

wherein the gas is selected from the group consisting of methyltrimethoxysilane, methyltriethoxysilane, dimethyldimethoxysilane, dimethyldiethoxysilane, trimethylmethoxysilane, trimethylethoxysilane, and combinations thereof.

2. The coated article of claim 1 , wherein the thermally reacting of the gas is within a temperature range of between 100° C. and 700° C.

3. The coated article of claim 1 , wherein the thermally reacting of the gas is within a temperature range of between 100° C. and 450° C.

4. The coated article of claim 1 , wherein the thermally reacting of the gas is within a temperature range of between 300° C. and 600° C.

5. The coated article of claim 1 , wherein the thermally reacting of the gas is within a temperature range of between 250° C. and 400° C.

6. The coated article of claim 1 , wherein the thermally reacting of the gas is within a pressure range of between 0.01 psia and 200 psia.

7. The coated article of claim 1 , wherein the thermally reacting of the gas is within a pressure range of between 1.0 psia and 100 psia.

8. The coated article of claim 1 , wherein the thermally reacting of the gas is within a pressure range of between 5 psia and 40 psia.

9. The coated article of claim 1 , wherein the thermally reacting of the gas is within a chamber or vessel having a volumetric range of between 3,000 cm 3 and 5,000 cm 3 .

10. The coated article of claim 1 , wherein the thermally reacting of the gas is within a chamber or vessel having a volumetric range of between 10,000 cm 3 and 20,000 cm 3 .

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 8, 2016
From: YUAN, MIN; SILVIS, PAUL H.; MATTZELA, JAMES B.
To: SILCOTEK CORP.
Reel/Frame 037436/0423 →
Cited By (3)
US 12,291,778 US 12,473,635 US 12,522,732