Granted Patent B2

US 12,522,732 · App. 18/331,647 · Granted Jan 13, 2026

Inventors: David A. Smith (Bellefonte, PA); James B. Mattzela (Port Matilda, PA); Paul H. Silvis (Port Matilda, PA); Gary A. Barone (Bellefonte, PA); Martin E. Higgins (Bellefonte, PA)

Assignee: Silcotek Corp.

C09D5/00C23C16/0272C23C16/18C23C16/30C23C16/401C23C16/56C23C30/00Y10T428/265Y10T428/31612Y10T428/31663

Abstract

Claims (26)

1 . An article comprising:

an anti-stiction, wer-resistant chemical vapor deposition coating deposited at a temperature of greater than 200° C., the anti-stiction, wear-resistant chemical vapor deposition coating comprising:

carbon, hydrogen, oxygen and amorphous silicon;

wherein the anti-stiction coating has a ratio of the Carbon: the Silicon: The Oxygen of about 1:2.25:1.75 and the anti-stiction coating has a coefficnent of friction between about 0.58 and about 0.05.

2 . An article comprising:

an anti-stiction, wear-resistant chemical vapor deposition coating deposited at a temperature of greater than 300° C., the anti-stiction, wear-resistant chemical vapor deposition coating comprising:

carbon, hydrogen, oxygen and amorphous silicon;

wherein the article is a piston head, a piston cylinder, tubing, a fitting, a rotary valve, a ball valve, a slide valve, an injector, a piston ring, a sliding o-ring, a cylinder, a regulator, a mixing system, a sampling apparatus, or an analytical system.

3 . The article of claim 2 , wherein the anti-stiction coating comprises an amorphous array of Si—C bonding.

4 . The article of claim 2 , wherein the anti-stiction coating has a coefficient of friction between about 0.58 and about 0.05.

5 . The article of claim 2 , wherein the anti-stiction coating comprises Si—C groups and Si—OH groups.

6 . The article of claim 2 , wherein the anti-stiction coating comprises Si—OH groups and Si—H groups.

7 . The article of claim 2 , wherein the anti-stiction coating comprises Si—H groups and Si—O—Si groups.

8 . The article of claim 2 , wherein the anti-stiction coating comprises Si—O—Si groups and Si—C groups.

9 . The article of claim 2 , wherein the anti-stiction coating comprises Si—O—Si groups and Si—H groups.

10 . The article of claim 2 , wherein the anti-stiction coating comprises Si—C groups, Si—OH groups, and Si—H groups.

11 . The article of claim 2 , wherein the anti-stiction coating comprises Si—C groups, Si—OH groups, and Si—O—Si groups.

12 . The article of claim 2 , wherein the anti-stiction coating comprises Si—C groups, Si—H groups, and Si—O—Si groups.

13 . The article of claim 2 , wherein the anti-stiction coating comprises Si—C groups, Si—OH groups, Si—H groups, and Si—O—Si groups.

14 . The article of claim 2 , wherein the anti-stiction coating comprises Si—C groups.

15 . The article of claim 2 , wherein the anti-stiction coating comprises Si—OH groups.

16 . . The article of claim 2 , wherein the anti-stiction coating comprises Si—H groups.

17 . The article of claim 2 , wherein the anti-stiction coating comprises Si—O—Si groups.

18 . The article of claim 2 , wherein the anti-stiction coating has a greater concentration of the silicon than the oxygen.

19 . The article of claim 2 , wherein the anti-stiction coating has a greater concentration of the oxygen than the carbon.

20 . The article of claim 2 , wherein the first layer has a greater concentration of the silicon than the carbon.

Assignments (1)

Continuity (5)

References Cited (167)