Mask frame assembly for thin layer deposition, method of manufacturing the same, and method of manufacturing display apparatus by using the mask frame assembly
A mask frame assembly through which a deposition material to be deposited on a substrate passes, the mask frame assembly includes a frame including an opening, and a mask having first and second ends in a length direction thereof coupled to the frame, in which the mask includes a main body part having a first thickness and including a pattern part, the pattern part including pattern holes through which the deposition material passes and a support part having a second thickness greater than the first thickness and extending away from first and second ends of the main body part.
1. A mask frame assembly through which a deposition material to be deposited on a substrate passes, the mask frame assembly comprising:
a frame comprising an opening; and
a mask coupled to the frame,
wherein:
the mask comprises:
a main body part having a first thickness and comprising a pattern part and at least one first alignment key, the pattern part comprising pattern holes through which the deposition material passes; and
a support part having a second thickness greater than the first thickness and contacting the frame and comprising at least one second alignment key;
a lower surface of the main body part is higher than a plane connecting two opposing lower surfaces of the support part contacting the frame;
an upper surface of the main body part and an upper surface of the support part are arranged in the same plane; and
the at least one first alignment key and the at least one second alignment key are aligned to correspond to each other in a length direction of the mask.
2. The mask frame assembly of claim 1 , further comprising a step part disposed between the main body part and the support part.
3. The mask frame assembly of claim 2 , wherein the step part has a third thickness that is greater than the first thickness and less than the second thickness.
4. The mask frame assembly of claim 1 , wherein the first thickness is in a range of about 5 μm to about 20 μm.
5. The mask frame assembly of claim 1 , wherein the second thickness is in a range of about 25 μm to about 100 μm.
6. The mask frame assembly of claim 1 , wherein a surface of the mask facing the substrate is planar.
7. A mask frame assembly through which a deposition material to be deposited on a substrate passes, the mask frame assembly comprising:
a frame comprising an opening; and
a mask coupled to the frame, the mask comprising:
a main body part haying a first thickness and comprising a pattern part, the pattern part comprising pattern holes through which the deposition material passes; and
a support part having a second thickness greater than the first thickness and contacting the frame;
wherein:
a lower surface of the main body part is higher than a plane connecting two opposing lower surfaces of the support part contacting the frame;
an upper surface of the main body part and an upper surface of the support part are arranged in the same plane; and
the support part and the main body part are separated from each other and welded to each other.
8. The mask frame assembly of claim 7 , wherein:
at least one first alignment key is formed at the main body part;
at least one second alignment key is formed at the support part; and
the at least one first alignment key and the at least one second alignment key are aligned to correspond to each other in a length direction of the mask.
9. The mask frame assembly of claim 7 , further comprising a step part disposed between the main body part and the support part.
10. The mask frame assembly of claim 9 , wherein the step part has a third thickness that is greater than the first thickness and less than the second thickness.
11. The mask frame assembly of claim 7 , wherein the first thickness is in a range of about 5 μm to about 20 μm.
12. The mask frame assembly of claim 7 , wherein the second thickness is in a range of about 25 μm to about 100 μm.
13. The mask frame assembly of claim 7 , wherein a surface of the mask facing the substrate is planar.