Light-emitting device and a method of manufacturing a light-emitting device in which material is deposited on first and second areas of a substrate
A method of manufacturing a light-emitting device including a body portion and a light-emitting portion arranged in the body portion and configured to emit light to the outside. The light-emitting portion includes a plurality of pixels. At least two of the pixels are configured to emit pieces of light having different wavelengths from each other.
1 . A method of manufacturing a light-emitting device, the method comprising:
assembling a mask assembly to comprise:
a mask frame; and
a plurality of mask sheets arranged on the mask frame in a first direction or a second direction with each mask sheet defining a plurality of pattern holes separated from one another in the first direction and the second direction;
arranging a process substrate and the mask assembly in a chamber;
depositing a deposition material by supplying the deposition material from a deposition source to the process substrate through the plurality of pattern holes of each of the plurality of mask sheets of the mask assembly;
shifting the process substrate or the mask assembly in the first direction; and
depositing a deposition material by supplying the deposition material from the deposition source to the process substrate through the plurality of pattern holes of each of the plurality of mask sheets of the mask assembly.
2 . The method of claim 1 , further comprising:
depositing the deposition material through a confirmation hole of the mask assembly to form deposition confirmation portions; and
shifting the process substrate or the mask assembly in the first direction to form one or more first direction patterns on the process substrate and in the second direction to form one or more second direction patterns, which are perpendicular with respect to the one or more first direction patterns, on the process substrate,
wherein one or more lines extending from each of the one or more first direction patterns to each of the deposition confirmation portions visibly intersects with one or more lines extending from each of the second direction patterns to each of the deposition confirmation portions for accuracy confirmation.
3 . The method of claim 2 , wherein the first direction and the second direction are perpendicular to each other.
4 . The method of claim 1 , wherein:
the plurality of pattern holes of each of the plurality of sheet masks are arranged in rows across each of the plurality of sheet masks, and
the plurality of pattern holes of each of the plurality of sheet masks is formed to guide the deposition material to at least two pixels arranged in a deposition area of the process substrate.
5 . The method of claim 1 , wherein the deposition material is deposited on the process substrate to form an auxiliary layer.
6 . The method of claim 1 , further comprising depositing the deposition material in a deposition confirmation area of the process substrate.
7 . The method of claim 6 , wherein the deposition confirmation area is between adjacent deposition areas of the process substrate.
8 . A method of manufacturing a light-emitting device, the method comprising:
assembling a mask assembly to comprise:
a mask frame; and
a plurality of mask sheets arranged on the mask frame in a first direction or a second direction with each mask sheet defining a plurality of pattern holes separated from one another in the first direction and the second direction;
depositing a deposition material through the plurality of pattern holes of the plurality of masks on a first area of a process substrate; and
depositing a deposition material through the plurality of pattern holes of the plurality of masks on a second area of the process substrate,
wherein at least a portion of the first area overlaps at least a portion of the second area.
9 . The method of claim 8 , wherein:
at least two pixels are arranged in each of the first area and the second area; and
a thickness of the deposition material in the pixel arranged only in the first area or the second area is different from a thickness of the deposition material in the pixel arranged in an area in which the first area overlaps the second area.
10 . A method of manufacturing a light-emitting device, the method comprising:
depositing a deposition material through the plurality of pattern holes of the plurality of masks on a first area of a process substrate; and
depositing a deposition material through the plurality of pattern holes of the plurality of masks on a second area of the process substrate,
wherein:
at least a portion of the first area overlaps at least a portion of the second area,
at least two pixels are arranged in each of the first area and the second area, and
a thickness of the deposition material in the pixel arranged only in the first area or the second area is different from a thickness of the deposition material in the pixel arranged in an area in which the first area overlaps the second area.