Filter and multiplexer
A filter includes: a first substrate; first and second piezoelectric thin film resonators located on the first substrate, each of the resonators including first and second electrodes facing each other across a piezoelectric film, a crystal orientation from the first electrode to the second electrode of the piezoelectric film being the same between the resonators, the first electrodes of the resonators connecting to each other in a connection region between resonance regions where the first and second electrodes face each other across the piezoelectric film, the second electrodes of the resonators failing to connect to each other, and an area of the resonance region being approximately the same between the resonators, a second substrate mounting the first substrate across an air gap; and a ground pattern located on the second substrate and not overlapping with the first electrode located in the resonance regions and the connection region.
1. A filter comprising:
a first substrate;
a first piezoelectric thin film resonator and a second piezoelectric thin film resonator located on a lower surface of the first substrate, each of the first piezoelectric thin film resonator and the second piezoelectric thin film resonator including a piezoelectric film, and a first electrode and a second electrode facing each other across the piezoelectric film, a crystal orientation from the first electrode to the second electrode of the piezoelectric film of the first piezoelectric thin film resonator being identical to that of the second piezoelectric thin film resonator in a resonance region where the first electrode and the second electrode face each other across the piezoelectric film, the first electrodes of the first piezoelectric thin film resonator and the second piezoelectric thin film resonator connecting to each other in a connection region between the resonance regions, the second electrodes of the first piezoelectric thin film resonator and the second piezoelectric thin film resonator failing to connect to each other in the connection region, and an area of the resonance region of the first piezoelectric thin film resonator being approximately equal to that of the second piezoelectric thin film resonator,
a second substrate, the first substrate being mounted on an upper surface of the second substrate so that the upper surface faces the lower surface of the first substrate across an air gap; and
a ground pattern that is located on the upper surface of the second substrate, and does not overlap with the first electrode located in the resonance regions of the first piezoelectric thin film resonator and the second piezoelectric thin film resonator and the connection region in plan view.
2. The filter according to claim 1 , wherein
the piezoelectric films of the first piezoelectric thin film resonator and the second piezoelectric thin film resonator and a piezoelectric film in the connection region are formed of a single piezoelectric film.
3. The filter according to claim 1 , further comprising:
a third piezoelectric thin film resonator that is located on the lower surface of the first substrate, includes another piezoelectric film, and another first electrode and another second electrode facing each other across the another piezoelectric film, at least a part of another resonance region where the another first electrode and the another second electrode face each other across the another piezoelectric film overlapping with the ground pattern in plan view.
4. The filter according to claim 1 , further comprising:
an input pad and an output pad located on the lower surface of the first substrate;
one or more parallel resonators that are located on the lower surface of the first substrate, and are connected in parallel between the input pad and the output pad, at least one parallel resonator of the one or more parallel resonators being divided in series into the first piezoelectric thin film resonator and the second piezoelectric thin film resonator; and
one or more series resonators that are located on the lower surface of the first substrate, and are connected in series between the input pad and the output pad.
5. The filter according to claim 4 , wherein
the at least one parallel resonator includes a parallel resonator closest to the input pad among the one or more parallel resonators.
6. The filter according to claim 5 , wherein
the one or more series resonators and the one or more parallel resonators are piezoelectric thin film resonators, and
the ground pattern overlaps with at least a part of the resonance region of at least one of the one or more series resonators and the one or more parallel resonators in plan view.
7. The filter according to claim 5 , further comprising
a plurality of ground pads located on the lower surface of the first substrate, wherein
at least two pads of the plurality of ground pads are bonded with one ground pattern of the ground pattern through a plurality of bumps.
8. The filter according to claim 1 , wherein
the first electrode is located between the first substrate and the piezoelectric film.
9. The filter according to claim 1 , wherein
the second electrode is located between the first substrate and the piezoelectric film.
10. A multiplexer comprising:
a filter including:
a first substrate;
a first piezoelectric thin film resonator and a second piezoelectric thin film resonator located on a lower surface of the first substrate, each of the first piezoelectric thin film resonator and the second piezoelectric thin film resonator including a piezoelectric film, and a first electrode and a second electrode facing each other across the piezoelectric film, a crystal orientation from the first electrode to the second electrode of the piezoelectric film of the first piezoelectric thin film resonator being identical to that of the second piezoelectric thin film resonator in a resonance region where the first electrode and the second electrode face each other across the piezoelectric film, the first electrodes of the first piezoelectric thin film resonator and the second piezoelectric thin film resonator connecting to each other in a connection region between the resonance regions, the second electrodes of the first piezoelectric thin film resonator and the second piezoelectric thin film resonator failing to connect to each other in the connection region, and an area of the resonance region of the first piezoelectric thin film resonator being approximately equal to that of the second piezoelectric thin film resonator,
a second substrate, the first substrate being mounted on an upper surface of the second substrate so that the upper surface faces the lower surface of the first substrate across an air gap; and
a ground pattern that is located on the upper surface of the second substrate, and does not overlap with the first electrode located in the resonance regions of the first piezoelectric thin film resonator and the second piezoelectric thin film resonator and the connection region in plan view.