Plasma equipment for treating powder
A powder plasma processing apparatus is disclosed. The powder plasma processing apparatus is a powder plasma processing apparatus of a circular surface discharge plasma module, and the apparatus includes a plate-like electrode layer serving as an external surface of the circular surface discharge plasma module, an insulating layer disposed on an internal surface of the plate-like electrode layer, and a plasma generating electrode disposed on the insulating layer, wherein the circular surface discharge plasma module rotates, an alternating voltage is applied to the plasma generating electrode and the plate-like electrode layer to generate plasma around the plasma generating electrode, and a powder for plasma processing is processed by the plasma within the circular surface discharge plasma module.
1. A method of processing a powder using a powder surface processing apparatus of a rotary cylindrical surface discharge plasma module:
the apparatus comprising:
a plate-like electrode layer serving as an external surface of the cylindrical surface discharge plasma module;
an insulating layer disposed on an internal surface of the plate-like electrode layer; and
a plurality of plasma generating electrodes in the form of a bar which are disposed on the insulating layer at intervals,
wherein the cylindrical surface discharge plasma module is configured to rotate and the plate-like electrode layer, insulating layer, and plurality of plasma generating electrodes are configured to rotate with the cylindrical surface discharge plasma module, the cylindrical surface discharge plasma module is configured to apply an alternating voltage to the plurality of plasma generating electrodes and the plate-like electrode layer to generate plasma around the plurality of plasma generating electrodes, and the cylindrical surface discharge plasma module is configured to position a powder on the plasma generating electrodes and treat the surface of the powder by the generated plasma,
wherein the apparatus comprises a driving unit configured to rotate the cylindrical surface discharge plasma module while the cylindrical surface discharge plasma module is in a horizontal state; and
the method comprising:
generating a plasma with the plasma generating electrodes of the powder surface processing apparatus;
rotating the cylindrical surface discharge plasma module, plate-like electrode layer, insulating layer, and plurality of plasma generating electrodes; and
contacting a powder with the plasma generated from the rotating plasma generating electrodes.
2. The method of claim 1 , wherein the plasma is generated from a plasma reaction gas injected into the surface discharge plasma module.
3. The method of claim 2 , wherein the plasma reaction gas comprises an inert gas and a gas containing oxygen, fluorine, or chlorine.
4. The method of claim 3 , wherein the inert gas comprises Ar or N 2 .
5. The method of claim 3 , wherein the gas containing oxygen comprises O 2 or N 2 O.
6. The method of claim 3 , wherein the gas containing fluorine comprises CF 4 or SF 6 .
7. The method of claim 3 , wherein the gas containing chlorine comprises Cl 2 or BCl 3 .
8. The method of claim 1 , wherein a high voltage is applied to the plate-like electrode layer, and the plurality of plasma generating electrodes are ground electrodes.
9. The method of claim 1 , wherein a high voltage is applied to the plurality of plasma generating electrodes, and the plate-like electrode layer is a ground electrode.
10. The method of claim 1 , wherein the plurality of the plasma generating electrodes are arranged on the insulating layer at intervals in the circumferential direction of the surface discharge plasma module, and extend in the longitudinal direction of the surface discharge plasma module.
11. The method of claim 1 , wherein the plurality of the plasma generating electrodes are arranged on the insulating layer at intervals in the longitudinal direction of the surface discharge plasma module, and extend in the circumferential direction of the surface discharge plasma module.
12. The method of claim 1 , wherein the driving unit includes a rotational speed control unit configured to control the speed at which the driving unit rotates the cylindrical surface discharge plasma module.