Semiconductor device and manufacturing method therefor
The present invention discloses a manufacturing method for a semiconductor device. The manufacturing method includes: providing a substrate; forming a semiconductor stacked structure on the substrate; forming at least apart of a stacked cap layer on the semiconductor stacked structure, wherein the part of the stacked cap layer includes a nitride layer; removing a part of the nitride layer; forming the rest part of the stacked cap layer; forming a protection layer on the stacked cap layer, and etching the protection layer to form an opening, wherein the nitride layer is not exposed by the opening; and introducing an etchant material into the opening to etch the substrate. The present invention also provides a semiconductor device made by the method.
1. A semiconductor device, comprising:
a substrate;
a semiconductor stacked structure on the substrate;
a stacked cap layer on the semiconductor stacked structure, wherein the stacked cap layer includes a first oxide cap layer, a nitride layer and a second oxide cap layer, wherein the nitride layer is between the first oxide cap layer and the second oxide cap layer; and
a protection layer on the stacked cap layer, the protection layer having at least one opening, wherein a part of the first oxide cap layer and a part of the second oxide cap layer are exposed by the opening, while the nitride layer is not exposed by the opening.