Insulating gate separation structure
One illustrative integrated circuit product disclosed herein includes a first final gate structure for a first transistor device, a second final gate structure for a second transistor device, the first and second transistors having a gate width direction and a gate length direction that is substantially normal to the gate width direction, and an insulating gate separation structure positioned between the first and second final gate structures, the insulating gate separation structure comprising an upper portion and a lower portion, the lower portion having a first lateral width in the gate width direction that is substantially uniform throughout a vertical height of the lower portion, the upper portion having a substantially uniform second lateral width in the gate width direction that is substantially uniform throughout a vertical height of the upper portion, wherein the second lateral width is less than the first lateral width.
1. An integrated circuit product, comprising:
a first final gate structure for a first transistor device;
a second final gate structure for a second transistor device, said first and second transistors having a gate width direction and a gate length direction that is substantially normal to said gate width direction; and
an insulating gate separation structure positioned between said first and second final gate structures, said insulating gate separation structure comprising an upper portion and a lower portion, said lower portion having a first lateral width in said gate width direction that is substantially uniform throughout a vertical height of said lower portion, said upper portion having a substantially uniform second lateral width in said gate width direction that is substantially uniform throughout a vertical height of said upper portion, wherein said second lateral width is less than said first lateral width and wherein said insulating gate separation structure has a substantially uniform third lateral width in said gate length direction throughout an overall vertical height of said gate separation structure, wherein there is a stepped transition between said upper portion and said lower portion of said gate separation structure.
2. The integrated circuit product of claim 1 , wherein said insulating gate separation structure comprises silicon nitride and said first final gate structure comprises a high-k (k value or 10 or greater) replacement gate insulation layer and a gate electrode that comprises at least one metal-containing layer of material.
3. The integrated circuit product of claim 1 , wherein said first final gate structure comprises a first end surface and said second final gate structure comprises a second end surface, wherein said first end surface engages both said upper portion and said lower portion of said insulating gate separation structure on a first side of said insulating gate separation structure and said second end surface engages both said upper portion and said lower portion of said insulating gate separation structure on a second side of said insulating gate separation structure that is opposite said first side of said insulating gate separation structure.
4. The integrated circuit product of claim 1 , wherein, when viewed in a cross-section taken through the gate separation structure in said gate width direction, said gate separation structure has an inverted “T” configuration.
5. The integrated circuit product of claim 1 , wherein said insulating gate separation structure comprises silicon nitride.
6. The integrated circuit product of claim 1 , wherein said first and second transistor devices are FinFET devices.
7. An integrated circuit product, comprising:
a first final gate structure for a first transistor device, said first final gate structure comprising a first end surface;
a second final gate structure for a second transistor device, said second final gate structure comprising a second end surface, said first and second transistors having a gate width direction and a gate length direction that is substantially normal to said gate width direction; and
an insulating gate separation structure positioned between said first and second final gate structures, said insulating gate separation structure comprising an upper portion and a lower portion, said lower portion having a first lateral width in said gate width direction, said upper portion having a second lateral width in said gate width direction, wherein said second lateral width is less than said first lateral width, wherein said first end surface engages both said upper portion and said lower portion of said insulating gate separation structure on a first side of said insulating gate separation structure and said second end surface engages both said upper portion and said lower portion of said insulating gate separation structure on a second side of said insulating gate separation structure that is opposite said first side of said insulating gate separation structure and wherein, when viewed in a cross-section taken through said gate separation structure in said gate width direction, said gate separation structure has an inverted “T” configuration.
8. The integrated circuit product of claim 7 , wherein said insulating gate separation structure has a substantially uniform third lateral width in said gate length direction throughout an overall vertical height of said gate separation structure.
9. An integrated circuit product, comprising:
a first final gate structure for a first transistor device comprising a first end surface;
a second final gate structure for a second transistor device comprising a second end surface, said first and second transistors having a gate width direction and a gate length direction that is substantially normal to said gate width direction; and
an insulating gate separation structure positioned between said first and second final gate structures, said insulating gate separation structure comprising an upper portion and a lower portion, said lower portion having a first lateral width in said gate width direction that is substantially uniform throughout a vertical height of said lower portion, said upper portion having a substantially uniform second lateral width in said gate width direction that is substantially uniform throughout a vertical height of said upper portion, wherein said second lateral width is less than said first lateral width and wherein said insulating gate separation structure has a substantially uniform third lateral width in said gate length direction throughout an overall vertical height of said gate separation structure, wherein said first end surface engages both said upper portion and said lower portion of said insulating gate separation structure on a first side of said insulating gate separation structure and said second end surface engages both said upper portion and said lower portion of said insulating gate separation structure on a second side of said insulating gate separation structure that is opposite said first side.
10. The integrated circuit product of claim 9 , wherein said insulating gate separation structure comprises silicon nitride and said first final gate structure comprises a high-k (k value or 10 or greater) replacement gate insulation layer and a gate electrode that comprises at least one metal-containing layer of material.
11. The integrated circuit product of claim 9 , wherein there is a stepped transition between said upper portion and said lower portion of said gate separation structure.
12. The integrated circuit product of claim 9 , wherein, when viewed in a cross-section taken through said gate separation structure in said gate width direction, said gate separation structure has an inverted “T” configuration.
13. The integrated circuit product of claim 12 , wherein said insulating gate separation structure comprises silicon nitride.