Display Device
A display device includes a display part that displays an image, a touch part on the display part, the touch part including a first conductive layer on the display part, a lower inorganic layer on the first conductive layer, an upper inorganic layer covering the lower inorganic layer and a second conductive layer on the upper inorganic layer. The upper inorganic layer includes substantially a same material as the lower inorganic layer. The upper inorganic layer has a hydrogen atomic percent less than a hydrogen atomic percent of the lower inorganic layer.
1. A display device, comprising:
a display part that displays an image; and
a touch part on the display part, the touch part including:
a first conductive layer on the display part;
a second conductive layer on the first conductive layer; and
an inorganic layer between the first conductive layer and the second conductive layer, and
wherein the inorganic layer includes:
a first part adjacent to the first conductive layer; and
a second part closer to the second conductive layer than the first part and having a hydrogen atomic percent less than a hydrogen atomic percent of the first part.
2. The display device as claimed in claim 1 , wherein the hydrogen atomic percent of the second part is greater than 0 and less than or equal to about 20.
3. The display device as claimed in claim 2 , wherein the inorganic layer includes silicon nitride.
4. The display device as claimed in claim 3 , wherein the second conductive layer includes copper.
5. The display device as claimed in claim 2 , wherein the first part has a breakdown voltage equal to or greater than about 5 MV/cm.
6. The display device as claimed in claim 5 , wherein the first part has a thickness greater than a thickness of the second part.
7. The display device as claimed in claim 1 , wherein:
the display part includes:
a base substrate;
an organic light emitting diode on the base substrate; and
a thin film encapsulation layer on the base substrate, the thin film encapsulation layer covering the organic light emitting diode and including an inorganic material, and the first conductive layer is directly on the thin film encapsulation layer.
8. The display device as claimed in claim 7 , wherein:
the first conductive layer includes first touch electrodes on the thin film encapsulation layer, the first touch electrodes extending in a first direction and being arranged in a second direction crossing the first direction, and
the second conductive layer includes second touch electrodes respectively crossing the first touch electrodes and insulated from the first touch electrodes by the second part and the first part.
9. The display device as claimed in claim 8 , wherein:
each of the first touch electrodes includes first sensing parts arranged in the first direction and spaced apart from each other, and first connection parts, each of the first connection parts being between the first sensing parts to connect two first sensing parts adjacent to each other among the first sensing parts, and
each of the second touch electrodes includes second sensing parts arranged in the second direction and spaced apart from each other, and second connection parts, each of the second connection parts being between the second sensing parts to connect two second sensing parts adjacent to each other among the second sensing parts.
10. The display device as claimed in claim 7 , wherein:
the first conductive layer includes:
first sensing parts on the thin film encapsulation layer, the first sensing parts being arranged in a first direction and spaced apart from each other;
connection parts on the thin film encapsulation layer and extending in the first direction, each connection part connecting two first sensing parts adjacent to each other among the first sensing parts; and
second sensing parts on the thin film encapsulation layer, the second sensing parts being arranged in a second direction crossing the first direction, spaced apart from each other, and insulated from the first sensing parts and the connection parts,
wherein the second conductive layer includes bridge electrodes on the first and second parts, and
wherein each of the bridge electrodes connecting two second sensing parts adjacent to each other among the second sensing parts through a thru-hole defined through the second part and the first part.
11. The display device as claimed in claim 1 , wherein the first part contacts the first conductive layer and the second part contacts the second conductive layer.
12. A display device, comprising:
a display part that displays an image; and
a touch part on the display part, the touch part including:
a first conductive layer on the display part;
a second conductive layer on the first conductive layer; and
an inorganic layer between the first conductive layer and the second conductive layer, the inorganic layer including a lower surface contacting the first conductive layer and an upper surface contacting the second conductive layer, and
wherein a hydrogen atomic percent of the inorganic layer in the upper surface is different from a hydrogen atomic percent of the inorganic layer in the lower surface.
13. The display device as claimed in claim 12 , wherein the hydrogen atomic percent of the inorganic layer in the upper surface is less than the hydrogen atomic percent of the inorganic layer in the lower surface.
14. The display device as claimed in claim 13 , wherein the hydrogen atomic percent of the inorganic layer in the upper surface is greater than 0 and less than or equal to about 20.
15. The display device as claimed in claim 12 , wherein the inorganic layer includes silicon nitride.
16. The display device as claimed in claim 15 , wherein the second conductive layer includes copper.