Metal-insulator-metal capacitors with enlarged contact areas
Structures that include a metal-insulator-metal (MIM) capacitor and methods for fabricating a structure that includes a MIM capacitor. The MIM capacitor includes a first electrode, a second electrode, and a third electrode. A conductive via is arranged in a via opening extending in a vertical direction through at least the first electrode. The first electrode has a surface arranged inside the via opening in a plane transverse to the vertical direction, and the conductive via contacts the first electrode over an area of the surface.
1. A structure comprising:
a metal-insulator-metal (MIM) capacitor including a first electrode, a second electrode, a third electrode, and a capacitor dielectric layer; and
a first conductive via in a first via opening extending in a vertical direction through the capacitor dielectric layer, the first electrode, and the second electrode,
wherein the first electrode has a first surface arranged inside the first via opening in a first plane transverse to the vertical direction, the first conductive via contacts the first electrode over an area of the first surface, and the first surface of the first electrode is between the first electrode and the second electrode.
2. The structure of claim 1 wherein the capacitor dielectric layer is arranged in the vertical direction between the first electrode and the second electrode, and the capacitor dielectric layer is arranged to circumscribe the first surface of the first electrode.
3. The structure of claim 2 wherein the second electrode has a second surface arranged in a second plane transverse to the vertical direction, the second surface is between the first electrode and the second electrode, the first conductive via contacts the second electrode over an area of the second surface, and the capacitor dielectric layer is arranged to circumscribe the second surface of the second electrode.
4. The structure of claim 1 further comprising:
a second conductive via in a second via opening extending vertically through the third electrode, the second via opening displaced laterally from the first via opening,
wherein the third electrode has a second surface arranged in a second plane transverse to the vertical direction, and the second conductive via contacts the third electrode over an area of the second surface.
5. A structure comprising:
a first interlayer dielectric layer,
a metal-insulator-metal (MIM) capacitor including a first electrode, a second electrode, a third electrode, and a capacitor dielectric layer; and
a first conductive via in a first via opening extending in a vertical direction through the capacitor dielectric layer and at least the first electrode,
wherein the first electrode has a first surface arranged inside the first via opening in a first plane transverse to the vertical direction, the first conductive via contacts the first electrode over an area of the first surface, the MIM capacitor is arranged in the vertical direction over the first interlayer dielectric layer, the first via opening is arranged in the first interlayer dielectric layer, and the first interlayer dielectric layer circumscribes the first surface of the first electrode.
6. The structure of claim 5 further comprising:
a second interlayer dielectric layer arranged in the vertical direction over the MIM capacitor,
wherein the first via opening extends in the vertical direction through the first interlayer dielectric layer, the first via opening extends in the vertical direction through the second interlayer dielectric layer, and the capacitor dielectric layer is arranged in the vertical direction between the first electrode and the second interlayer dielectric layer.
7. The structure of claim 6 further comprising:
a second conductive via in a second via opening extending vertically through the second interlayer dielectric layer and the second electrode, the second via opening displaced laterally from the first via opening,
wherein the second electrode has a second surface arranged in a second plane transverse to the vertical direction, and the second conductive via contacts the second electrode over an area of the second surface.
8. The structure of claim 7 wherein the second via opening extends through the capacitor dielectric layer, and the capacitor dielectric layer is arranged to circumscribe the second surface of the second electrode.
9. The structure of claim 6 wherein the first electrode has a second surface arranged in a second plane transverse to the vertical direction, and the first conductive via contacts the first electrode over an area of the second surface.
10. The structure of claim 9 wherein the capacitor dielectric layer is arranged in the vertical direction between the first electrode and the second interlayer dielectric layer, and the capacitor dielectric layer is arranged to circumscribe the second surface of the first electrode.
11. The structure of claim 5 wherein the capacitor dielectric layer is arranged in the vertical direction between the first electrode and the first interlayer dielectric layer, the first via opening extends through the capacitor dielectric layer, and the capacitor dielectric layer is arranged to circumscribe the first surface of the first electrode.
12. The structure of claim 11 further comprising:
a second conductive via in a second via opening extending vertically through the second electrode, the second via opening displaced laterally from the first via opening,
wherein the second electrode has a second surface arranged in a second plane transverse to the vertical direction, and the second conductive via contacts the second electrode over an area of the second surface.
13. A method comprising:
forming a metal-insulator-metal (MIM) capacitor including a first electrode, a second electrode, and a third electrode;
forming a first via opening extending in a vertical direction through the first electrode;
etching a dielectric layer relative to the first electrode with an isotropic etching process to expose a first surface on the first electrode inside the first via opening that is arranged in a first plane transverse to the vertical direction; and
forming a first conductive via in the first via opening that contacts the first electrode over an area of the first surface.
14. The method of claim 13 wherein the dielectric layer is arranged in the vertical direction between the first electrode and the second electrode, the first via opening extends in the vertical direction through the dielectric layer and the second electrode, the first surface of the first electrode is between the first electrode and the second electrode, and the dielectric layer is arranged to circumscribe the first surface of the first electrode.
15. The method of claim 14 wherein the second electrode has a second surface arranged inside the first via opening in a second plane transverse to the vertical direction, the second surface of the second electrode is between the first electrode and the second electrode, the first conductive via contacts an area of the second surface of the second electrode, and the dielectric layer is arranged to circumscribe the second surface of the second electrode.
16. The method of claim 13 further comprising:
forming a second via opening extending vertically through the third electrode, the second via opening displaced laterally from the first via opening; and
forming a second conductive via in the second via opening,
wherein the third electrode has a second surface arranged inside the second via opening in a second plane transverse to the vertical direction, and the second conductive via contacts the third electrode over the area of the second surface.
17. The method of claim 13 further comprising:
depositing an interlayer dielectric layer arranged in the vertical direction over the MIM capacitor,
wherein the first via opening extends in the vertical direction through the interlayer dielectric layer, and the interlayer dielectric layer circumscribes the first surface of the first electrode.
18. The method of claim 17 wherein the MIM capacitor includes a capacitor dielectric layer arranged in the vertical direction between the first electrode and the interlayer dielectric layer, the first via opening extends through the capacitor dielectric layer, and the capacitor dielectric layer is arranged to circumscribe the first surface of the first electrode.
19. The method of claim 13 further comprising:
before forming the MIM capacitor, depositing an interlayer dielectric layer,
wherein the MIM capacitor is arranged in the vertical direction over the interlayer dielectric layer, the first via opening is arranged in the interlayer dielectric layer, and the interlayer dielectric layer circumscribes the first surface of the first electrode.
20. The method of claim 19 wherein the MIM capacitor includes a capacitor dielectric layer arranged in the vertical direction between the first electrode and the interlayer dielectric layer, the first via opening extends through the capacitor dielectric layer, and the capacitor dielectric layer is arranged to circumscribe the first surface of the first electrode.