Multiple deep trench isolation (MDTI) structure for CMOS image sensor

1. A CMOS image sensor, comprising:

a substrate having a front-side and a back-side opposite to the front-side;

a plurality of pixel regions disposed on the substrate and respectively comprising a photodiode configured to convert radiation that enters the substrate from the back-side into an electrical signal;

a boundary deep trench isolation (BDTI) structure disposed between adjacent pixel regions, extending from the back-side of the substrate to a first depth within the substrate, and surrounding the photodiode;

a multiple deep trench isolation (MDTI) structure disposed within the plurality of pixel regions, extending from the back-side of the substrate to a second depth within the substrate, and overlying the photodiode; and

a dielectric layer filling in a BDTI trench of the BDTI structure and a MDTI trench of the MDTI structure;

wherein the MDTI structure comprises segments that are spaced apart from one other and are symmetrical along a middle line of the pixel region.

2. The CMOS image sensor of claim 1 , wherein the dielectric layer extends upwardly, and is disposed continuously between the BDTI structure and the MDTI structure.

3. The CMOS image sensor of claim 1 , wherein the dielectric layer comprise a first oxide layer lining sidewalls of the BDTI trench and the MDTI trench, a high-k dielectric layer disposed on the first oxide layer, and a second oxide layer filling remaining spaces of the BDTI trench and the MDTI trench.

4. The CMOS image sensor of claim 1 , wherein the first depth is greater than the second depth.

5. The CMOS image sensor of claim 1 , wherein a ratio of the first depth to the second depth is in a range of from about 1:2 to about 1:6.

6. The CMOS image sensor of claim 1 , wherein a ratio of a first minimum width of the BDTI structure to a second minimum width the MDTI structure is in a range of from about 1:1 to about 1:4.

7. The CMOS image sensor of claim 1 , wherein the MDTI structure comprises a quadrangle that has a diagonal line coincide with a middle line of the pixel region.

8. The CMOS image sensor of claim 1 , wherein the MDTI structure comprises a first perimeter and a second perimeter concentric to one another.

9. The CMOS image sensor of claim 1 , wherein the MDTI structure comprises a first segment and a second segment that cross one other at a center region of the pixel region.

10. The CMOS image sensor of claim 1 ,

wherein the photodiode comprises a doped layer with a first doping type and an adjoining region of the substrate with a second doping type that is different than the first doping type.

11. The CMOS image sensor of claim 10 , wherein the doped layer and the MDTI structure are separated by the substrate.

12. The CMOS image sensor of claim 1 ,

wherein the plurality of pixel regions comprises a first group of pixels that are configured as phase detection autofocus (PDAF) pixels and a second group of pixels;

wherein the MDTI structure is disposed within the first group of pixels and is absent from the second group of pixels.

13. The CMOS image sensor of claim 12 , wherein the BDTI structure is absent from a boundary region between adjacent pixels of the first group of pixels.

14. The CMOS image sensor of claim 12 , wherein the MDTI structure is arranged in the first group of pixels as one continuous integral unit.

15. A CMOS image sensor, comprising:

a substrate having a front-side and a back-side opposite to the front-side;

a plurality of pixel regions disposed on the substrate and respectively comprising a transfer gate arranged on the front-side of the substrate and a photodiode arranged at one side of the transfer gate and configured to convert radiation that enters the substrate from the back-side into an electrical signal;

a boundary deep trench isolation (BDTI) structure disposed between adjacent pixel regions, extending from the back-side of the substrate to a first depth within the substrate, and surrounding the photodiode; and

a multiple deep trench isolation (MDTI) structure disposed within the individual pixel region, extending from the back-side of the substrate to a second depth within the substrate, and overlying the photodiode;

wherein the MDTI structure comprises a first oxide layer lining sidewalls of a MDTI trench, a high-k dielectric layer disposed on the first oxide layer, and a second oxide layer filling remaining spaces of the MDTI trench.

16. The CMOS image sensor of claim 15 , wherein the MDTI structure is symmetrical to a middle line of the pixel region.

17. The CMOS image sensor of claim 15 , wherein the first oxide layer fills in a BDTI trench of the BDTI structure and continuously extends in lateral between the BDTI structure and the MDTI structure.

18. A CMOS image sensor, comprising:

a transfer gate disposed over a front-side of a substrate;

a plurality of photodiodes within a plurality of pixel regions and disposed within the substrate at one side of the transfer gate;

a multiple deep trench isolation (MDTI) structure disposed overlying the photodiodes at a back-side of the substrate;

a boundary deep trench isolation (BDTI) structure disposed between adjacent pixel regions and surrounding the photodiodes;

wherein the plurality of pixel regions comprises a first group of pixels that are configured as phase detection autofocus (PDAF) pixels and a second group of pixels;

wherein the MDTI structure is disposed within the first group of pixels and is absent from the second group of pixels.

19. The CMOS image sensor of claim 18 , further comprising: a plurality of color filters over the BDTI structure and the MDTI structure.

20. The CMOS image sensor of claim 1 , wherein the MDTI structure comprises a plurality of quadrangle structures.