Adjustable extended electrode for edge uniformity control
Embodiments described herein generally related to a substrate processing apparatus. In one embodiment, a process kit for a substrate processing chamber disclosed herein. The process kit includes an edge ring having a top surface and a bottom surface. An adjustable tuning ring is positioned beneath the bottom surface of the edge ring. The adjustable tuning ring has an upper surface and a lower surface. The lower surface is configured to interface with an actuating mechanism configured to move the adjustable tuning ring relative to the edge ring.
1. A process kit for a substrate support in a processing chamber, the process kit comprising:
an edge ring having a top surface and a bottom surface; and
an adjustable tuning ring positioned beneath the bottom surface of the edge ring, the adjustable tuning ring having an upper surface and a lower surface, the lower surface configured to interface with an actuating mechanism configured to move the adjustable tuning ring relative to the edge ring.
2. The process kit of claim 1 wherein the adjustable tuning ring further comprises:
an annular body;
a cavity formed in the annular body, the cavity formed in the bottom surface of the annular body; and
an access orifice formed in the annular body, the access orifice extending from the top surface of the adjustable tuning ring into the cavity.
3. The process kit of claim 2 , wherein the access orifice has a first diameter and the cavity has a second diameter, the first diameter being smaller than the second diameter.
4. The process kit of claim 3 , wherein the cavity has a first diameter and the access orifice has a second diameter, the first diameter being larger than the second diameter.
5. The process kit of claim 2 , wherein the adjustable tuning ring further comprises:
a coating formed on the upper surface.
6. A substrate support for a substrate processing chamber, the substrate support comprising:
a dielectric body configured to support a substrate thereon;
an edge ring disposed at least partially on the dielectric body, the edge ring having a top surface and a bottom surface;
an adjustable tuning ring positioned beneath the edge ring, the adjustable tuning ring having a top surface, the top surface of the adjustable tuning ring and the edge ring defining an adjustable gap; and
an actuating mechanism coupled to the adjustable tuning ring, the actuating mechanism configured to alter the adjustable gap.
7. The substrate support of claim 6 , wherein the actuating mechanism comprises:
a lift pin having a first end and a second end, the first end of the lift pin contacting a bottom surface of the adjustable tuning ring, the second end of the lift pin in communication with a lift mechanism.
8. The substrate support of claim 6 , wherein the adjustable tuning ring further comprises:
an access orifice disposed in the top surface, the access orifice having a first diameter smaller than a second diameter.
9. The substrate support of claim 8 , wherein the actuating mechanism is a screw accessible through the access orifice, the screw configured to be rotated through the access orifice to actuate the adjustable tuning ring.
10. The substrate support of claim 6 further comprising:
a cooling plate disposed below the dielectric body, wherein the cooling plate couples power to the edge ring at least partially through the tuning ring.
11. The substrate support of claim 10 , wherein a capacitance between the edge ring and the tuning ring is adjustable by the actuating mechanism.
12. The substrate support of claim 10 further comprising:
one or more dielectric pads disposed between the tuning ring and the cooling plate, the dielectric pads creating a gap decreasing a capacitance and minimizing the power coupled from the cathode to the tuning ring.
13. A processing chamber comprising:
a dielectric body disposed in the processing chamber and configured to support a substrate thereon;
an edge ring disposed at least partially on the dielectric body, the edge ring having a top surface and a bottom surface;
an adjustable tuning ring positioned beneath the edge ring, the adjustable tuning ring having a top surface, the top surface of the adjustable tuning ring and the edge ring defining an adjustable gap; and
an actuating mechanism coupled to the adjustable tuning ring, the actuating mechanism configured to alter the adjustable gap.
14. The processing chamber claim 13 , wherein the actuating mechanism comprises:
a lift pin having a first end and a second end, the first end of the lift pin contacting a bottom surface of the adjustable tuning ring, the second end of the lift pin in communication with a lift mechanism.
15. The processing chamber claim 13 , wherein the adjustable tuning ring further comprises:
an access orifice disposed in the top surface, the access orifice having a first diameter smaller than a second diameter.
16. The processing chamber of claim 15 , wherein the actuating mechanism is a screw accessible through the access orifice, the screw configured to be rotated through the access orifice to actuate the adjustable tuning ring.
17. The processing chamber of claim 13 further comprising:
a cooling plate disposed below the dielectric body, wherein the cooling plate couples power to the edge ring at least partially through the tuning ring.
18. The processing chamber of claim 17 , wherein a capacitance between the edge ring and the tuning ring is adjustable by the actuating mechanism.
19. The processing chamber of claim 17 further comprising:
one or more dielectric pads disposed between the tuning ring and the cooling plate, the dielectric pads creating a gap.
20. The processing chamber of claim 13 , wherein the actuating mechanism is configured to control a size of a plasma sheath formed between a plasma and the substrate.