Fingerprint sensor device and method

1. A semiconductor device comprising:

a fingerprint sensor;

a high voltage chip in electrical connection with the fingerprint sensor, the high voltage chip having a first surface disposed at a first distance from the fingerprint sensor; and

a substrate in electrical connection with the fingerprint sensor, the substrate having a second surface disposed at a second distance from the fingerprint sensor, wherein the first distance is greater than the second distance.

2. The semiconductor device of claim 1 , further comprising through vias electrically connecting the fingerprint sensor to the high voltage chip.

3. The semiconductor device of claim 2 , wherein the through vias extend through a semiconductor substrate of the fingerprint sensor.

4. The semiconductor device of claim 2 , wherein the through vias extend through an encapsulant encapsulating the fingerprint sensor.

5. The semiconductor device of claim 1 , wherein the substrate is a printed circuit board.

6. The semiconductor device of claim 1 , wherein the substrate comprises an opening, and wherein the high voltage chip extends into the opening.

7. A semiconductor device comprising:

a sensor module having a first side and a second side opposite to the first side;

a first metallization layer on the first side of the sensor module;

a second metallization layer on a second side of the sensor module; and

a high voltage chip attached to the second metallization layer, the second metallization layer being interposed between high voltage chip and the sensor module.

8. The semiconductor device of claim 7 , further comprising a through via electrically connecting the first metallization layer to the second metallization layer.

9. The semiconductor device of claim 8 , further comprising an encapsulant encapsulating the sensor module and the through via.

10. The semiconductor device of claim 7 , further comprising a sensor surface material located on the first side of the sensor module, the first metallization layer being interposed between the sensor surface material and the sensor module.

11. The semiconductor device of claim 10 , further comprising an interface layer between the sensor surface material and the first metallization layer.

12. The semiconductor device of claim 7 , wherein the second metallization layer comprises underbump metallizations.

13. The semiconductor device of claim 7 , further comprising a substrate attached to the second metallization layer.

14. The semiconductor device of claim 13 , wherein the substrate comprises an opening, and wherein the high voltage chip is disposed at least partially within the opening.

15. A semiconductor device comprising:

a high voltage chip electrically connected to a first redistribution layer;

a sensor chip electrically connected to the first redistribution layer, the first redistribution layer being interposed between the sensor chip and the high voltage chip; and

a second redistribution layer electrically connected to the sensor chip, wherein the sensor chip is interposed between the first redistribution layer and the second redistribution layer.

16. The semiconductor device of claim 15 , further comprising a through via electrically connecting the first redistribution layer to the second redistribution layer.

17. The semiconductor device of claim 16 , further comprising an encapsulant in physical contact with the through via and extending from a sidewall of the through via to a sidewall of the sensor chip.

18. The semiconductor device of claim 15 , further comprising:

an interface material adjacent to the second redistribution layer; and

a sensor surface material adjacent to the interface material, the interface material being interposed between the sensor surface material and the second redistribution layer.

19. The semiconductor device of claim 15 , further comprising a color film layer adjacent to the second redistribution layer.

20. The semiconductor device of claim 15 , further comprising a substrate attached to the first redistribution layer, wherein the substrate comprises an opening, and wherein the high voltage chip extends into the opening.