Method of fabricating semiconductor device

1. A method of fabricating a semiconductor device, the method comprising:

forming a lower layer on a substrate;

forming, on the lower layer, a sacrificial layer and an etching pattern, wherein the sacrificial layer comprises a protrusion that protrudes from a top surface of the sacrificial layer, and wherein the etching pattern is on the protrusion;

forming a first spacer layer on the sacrificial layer and the etching pattern;

etching the sacrificial layer and the first spacer layer to form a sacrificial pattern and a first spacer on at least a portion of a top surface of the sacrificial pattern;

forming a second spacer layer on the sacrificial pattern and the first spacer;

etching the second spacer layer and the first spacer to form a second spacer on a sidewall of the sacrificial pattern, wherein the second spacer layer and the first spacer are etched until the at least the portion of the top surface of the sacrificial pattern is exposed; and

etching the lower layer to form a pattern, while using the second spacer as an etching mask.

2. The method of claim 1 , wherein the etching pattern is removed when the sacrificial layer and the first spacer layer are etched.

3. The method of claim 1 , wherein the second spacer remains on a top surface of the pattern formed by the etching the lower layer.

4. The method of claim 1 , further comprising: removing the sacrificial pattern before the etching the lower layer.

5. A method of fabricating a semiconductor device, the method comprising:

forming a sacrificial layer, a first etching pattern, and a second etching pattern on a substrate including a first region and a second region,

wherein the sacrificial layer comprises:

a first protrusion that is on the first region and protrudes from a top surface of the sacrificial layer; and

a second protrusion that is on the second region,

the first etching pattern being on the first protrusion and the second etching pattern being on the second protrusion;

forming a first spacer layer on the sacrificial layer, the first etching pattern, and the second etching pattern; and

etching the first spacer layer and the sacrificial layer to form a first sacrificial pattern and a first spacer on the first region of the substrate and to form a second sacrificial pattern and a second spacer on the second region of the substrate;

wherein the first etching pattern is on a top surface of the first sacrificial pattern after the etching,

wherein the second spacer is formed on a top surface of the second sacrificial pattern, and

wherein a top surface of the first etching pattern is located at a different level from that of a top surface of the second spacer.

6. The method of claim 5 , wherein the top surface of the first etching pattern is at a higher level than the top surface of the second spacer.

7. The method of claim 5 ,

wherein the first sacrificial pattern comprises a first segment and a second segment on the first segment, and

wherein a width of the first segment is greater than a width of the second segment.

8. The method of claim 7 , wherein

the first spacer is formed on a side surface of the first etching pattern, a side surface of the second segment, and a top surface of the first segment, and

a side surface of the first segment is exposed through the first spacer.

9. The method of claim 7 ,

wherein a top surface of the second segment is at a higher level than the top surface of the second sacrificial pattern, and

wherein a top surface of the first segment is coplanar with the top surface of the second sacrificial pattern.

10. The method of claim 5 , further comprising:

forming a first layer on the substrate, the first layer exhibiting etch selectivity to the substrate; and

forming a second layer on the substrate, the second layer exhibiting etch selectivity to the first layer and exhibiting etch selectivity to the second sacrificial pattern,

wherein the second spacer is spaced apart from the second layer.

11. The method of claim 5 , further comprising:

before etching the first spacer layer and the sacrificial layer, forming a mask pattern on the first region of the substrate to expose a portion of the sacrificial layer that is on the second region of the substrate and to expose a portion of the first spacer layer that is on a sidewall of the first protrusion,

wherein the mask pattern is used as an etching mask to etch the first spacer layer and the sacrificial layer, and

wherein the mask pattern is removed by being etched simultaneously with the first spacer layer and the sacrificial layer.

12. The method of claim 5 , wherein the first region comprises a peripheral circuit zone, and the second region comprises a cell zone.

13. The method of claim 5 ,

wherein a thickness of the second sacrificial pattern is equal to a thickness between the top surface of the sacrificial layer and a bottom surface of the sacrificial layer, and

wherein the top surface of the sacrificial layer is exposed through the first and second etching patterns.

14. The method of claim 5 ,

wherein the second etching pattern is removed by being etched simultaneously with the etching of the first spacer layer and the sacrificial layer, and

wherein the first spacer is formed on side surfaces of the first sacrificial pattern and the first etching pattern.

15. The method of claim 14 , further comprising:

forming a lower layer between the substrate and the sacrificial layer,

wherein, after etching the first spacer layer and the sacrificial layer, a top surface of the lower layer is partially exposed through the first sacrificial pattern and the second sacrificial pattern.

16. The method of claim 15 , after etching the first spacer layer and the sacrificial layer, the method further comprising:

forming a second spacer layer on the first etching pattern, the first spacer, the second spacer, the second etching pattern, and a portion of the top surface of the lower layer;

etching the second spacer layer and the second spacer to form a third spacer on a side surface of the first spacer and to form a fourth spacer on a side surface of the second sacrificial pattern, wherein the second spacer layer and the second spacer are etched to expose the top surface of the second sacrificial pattern, a portion of the top surface of the lower layer, and the top surface of the first etching pattern;

removing the second sacrificial pattern; and

etching the lower layer to form a first pattern on the first region of the substrate and to form a second pattern on the second region of the substrate,

wherein the first etching pattern, the first sacrificial pattern, the first spacer, the third spacer, and the fourth spacer are used as an etching mask to etch the lower layer.

17. The method of claim 16 ,

wherein the first spacer is removed during the etching the lower layer,

wherein the third spacer and the first sacrificial pattern are on the first pattern after the etching the lower layer, and

wherein the fourth spacer is on the second pattern after the etching the lower layer.

18. A method of fabricating a semiconductor device, the method comprising:

forming a sacrificial layer, a first etching pattern, and a second etching pattern on a substrate including a first region and a second region,

wherein the sacrificial layer comprises:

a first protrusion that is on the first region and protrudes from a top surface of the sacrificial layer; and

a second protrusion that is on the second region,

the first etching pattern being on the first protrusion and the second etching pattern being on the second protrusion;

forming a first spacer layer on the sacrificial layer, the first etching pattern, and the second etching pattern; and

etching the first spacer layer and the sacrificial layer to form a first sacrificial pattern and a first spacer on the first region of the substrate and to form a second sacrificial pattern and a second spacer on the second region of the substrate,

wherein the first spacer is formed on a side surface of the first sacrificial pattern, and

wherein the second spacer is formed on a top surface of the second sacrificial pattern.

19. The method of claim 18 ,

wherein after etching the first spacer layer and the sacrificial layer, the first etching pattern remains on a top surface of the first sacrificial pattern, and

wherein the second etching pattern is removed by being etched simultaneously when the first spacer layer and the sacrificial layer are etched.

20. The method of claim 19 , wherein the first spacer is on a side surface of the first etching pattern and exposes a top surface of the first etching pattern.