Well-based vertical Hall element with enhanced magnetic sensitivity
A vertical Hall element and method of fabricating are disclosed. The method includes forming a buried region having a first conductivity type in a substrate having a second conductivity type and implanting a dopant of the first conductivity type into a well region between the top surface of the substrate and the buried region. The buried region has a doping concentration increasing with an increasing depth from a top surface of the substrate and the well region has a doping concentration decreasing from the top surface of the substrate to the buried region. The method includes forming first through fifth contacts on the well region. First and second contacts define a conductive path and second and third contacts define another conductive path through the well region. The fourth contact is formed between first and second contacts and the fifth contact is formed between second and third contacts.
1. An integrated circuit (IC) chip comprising:
a substrate having a top surface and a first conductivity type;
a well region formed in the substrate, the well region doped with a first dopant of a second conductivity type that is opposite the first conductivity type and having a first doping concentration that decreases with an increasing distance from the top surface of the substrate;
a buried region formed under and in contact with the well region, the buried region doped with a second dopant of the second conductivity type and having a second doping concentration that increases with increasing distance from the well region;
first, second and third contacts formed on the well region, the first and second contacts defining a first conductive path through the well region, the second and third contacts defining a second conductive path through the well region;
a fourth contact forming on the well region between the first and second contacts; and
a fifth contact formed on the well region between the second and third contacts.
2. The IC chip as recited in claim 1 further comprising a ring of contacts of the first conductivity type surrounding an outer perimeter of the well region, the ring of contacts being coupled to a lower rail.
3. The IC chip as recited in claim 2 wherein the first doping concentration ranges between approximately 1×10 14 /cm 3 and 3×10 16 /cm 3 .
4. The IC chip as recited in claim 3 wherein the second doping concentration ranges between approximately 5×10 15 /cm 3 and 9×10 18 /cm 3 .
5. The IC chip as recited in claim 4 further comprising biasing circuitry coupled to the first, second and third contacts.
6. The IC chip as recited in claim 5 further comprising a voltage detector coupled to the fourth and fifth contacts.
7. A vertical Hall element comprising:
a substrate having a top surface and a first conductivity type;
a well region formed in the substrate, the well region being doped with a first dopant of a second conductivity type that is opposite the first conductivity type and having a first doping concentration that decreases with an increasing distance from the top surface of the substrate;
a buried region formed under and in contact with the well region, the buried region being doped with a second dopant of the second conductivity type and having a second doping concentration that increases with an increasing distance from the well region;
first, second and third contacts formed on the well region, the first and second contacts defining a first conductive path through the well region, the second and third contacts defining a second conductive path through the well region;
a fourth contact formed on the well region between the first and second contacts; and
a fifth contact formed on the well region between the second and third contacts.
8. An integrated circuit (IC) chip comprising:
a substrate having a top surface and a first conductivity type;
a well region formed in the substrate, the well region doped with a first dopant of a second conductivity type that is opposite the first conductivity type and having a first doping concentration that decreases with an increasing distance from the top surface of the substrate;
a buried region formed under and in contact with the well region, the buried region doped with a second dopant of the second conductivity type and having a second doping concentration that increases with increasing distance from the well region;
a first group of contacts formed in the well region;
a second group of contacts formed in the well region;
a biasing circuit electrically coupled to the first group of contacts; and
a voltage detector electrically coupled to the second group of contacts.
9. An integrated circuit (IC) chip comprising:
a buried region having a first dopant of a first conductivity type in a substrate having a second conductivity type opposite the first conductivity type, the buried region having a first doping concentration increasing with an increasing depth extended from a top surface of the substrate;
a well region having a second dopant of the first conductivity type between the top surface of the substrate and the buried region, the well region having a second doping concentration decreasing from the top surface of the substrate to the buried region;
first, second and third contacts on a top surface of the well region, the first and second contacts defining a first conductive path through the well region, the second and third contacts defining a second conductive path through the well region;
a fourth contact on the well region between the first and second contacts; and
a fifth contact on the well region between the second and third contacts.
10. An integrated circuit (IC) chip comprising:
a diffused first dopant in a predefined region of an annealed substrate to form a buried region having a first dopant of a first conductivity type in a substrate having a second conductivity type opposite the first conductivity type;
a first doping concentration in the buried region increasing with an increasing depth extended from a top surface of the substrate;
an epitaxial layer, having an implanted dopant, on the substrate forming the buried region, the epitaxial layer having the second conductivity type;
a second dopant of the first conductivity type in a well region between the top surface of the epitaxial layer and the buried region, the well region having a second doping concentration decreasing from the top surface of the epitaxial layer to the buried region;
second and third contacts on a top surface of the well region, the first and second contacts defining a first conductive path through the well region, the second and third contacts defining a second conductive path through the well region;
a fourth contact on the well region between the first and second contacts; and
a fifth contact on the well region between the second and third contacts.
11. The IC chip as recited in claim 9 further comprising an isolation structure at the surface of the substrate, the isolation structure defining openings through which the first, second, third, fourth and fifth contacts, and a plurality of contacts having the second conductivity type, are formed.
12. The IC chip as recited in claim 11 further comprising a third dopant having the first conductivity type forming the first, second, third, fourth, and fifth contacts.
13. The IC chip as recited in claim 12 further comprising a fourth dopant having the second conductivity type forming the plurality of contacts around an outside, perimeter of the well region.
14. The IC chip as recited in claim 13 wherein the buried region comprises implanted antimony.
15. The IC chip as recited in claim 13 wherein the second dopant comprises phosphorus.
16. The IC chip as recited in claim 13 wherein the fourth dopant comprises boron.
17. The IC chip as recited in claim 10 further comprising an isolation structure at the surface of the epitaxial layer, the isolation structure defining openings through which the first, second, third, fourth and fifth contacts and a plurality of contacts having the second conductivity type are formed.
18. The IC chip as recited in claim 10 further comprising a third dopant having the first conductivity type implanted into the well region to form the first, second, third, fourth, and fifth contacts.
19. The IC chip as recited in claim 12 further comprising a fourth dopant having the second conductivity type implanted into the epitaxial layer to form the plurality of contacts around an outside perimeter of the well region.
20. The IC chip as recited in claim 10 wherein the buried region comprises antimony.
21. The IC chip as recited in claim 10 wherein the second dopant comprises phosphorus.
22. The IC chip as recited in claim 18 wherein implanting the third dopant comprises arsenic.
23. The IC chip as recited in claim 19 wherein the fourth dopant comprises boron.
24. An integrated circuit chip (IC) comprising:
a buried region having a first dopant of a first conductivity type in a substrate having a second conductivity type opposite the first conductivity type, the buried region having a first doping concentration increasing with an increasing depth extended from a top surface of the substrate;
a second dopant of the first conductivity type in a well region in an epitaxial layer on top of the substrate, between a top surface of the epitaxial layer and the buried region, the well region having a second doping concentration decreasing from the top surface of the epitaxial layer to the buried region;
first, second and third contacts on a top surface of the well region, the first and second contacts defining a first conductive path through the well region, the second and third contacts defining a second conductive path through the well region;
a fourth contact on the well region between the first and second contacts; and
a fifth contact on the well region between the second and third contacts.