Composite sacrificial gate with etch selective layer
The manufacture of a FinFET device includes the formation of a composite sacrificial gate. The composite sacrificial gate includes a sacrificial gate layer such as a layer of amorphous silicon, and an etch selective layer such as a layer of silicon germanium. The etch selective layer, which underlies the sacrificial gate layer, enables the formation of a gate cut opening having a controlled critical dimension that extends through the composite sacrificial gate.
1. A method of forming a structure, comprising:
forming a composite sacrificial gate over a plurality of semiconductor fins, wherein forming the composite sacrificial gate comprises forming an etch selective layer over the fins and forming a sacrificial gate layer over the etch selective layer;
forming a gate cut opening that extends through the composite sacrificial gate, wherein the gate cut opening is laterally spaced away from each of a pair of the fins, and forming the gate cut opening includes etching the etch-selective layer to form an undercut region that extends laterally beneath the sacrificial gate layer; and
forming an isolation layer within the gate cut opening.
2. The method of claim 1 , wherein the etch selective layer comprises silicon germanium or doped silicon and the sacrificial gate layer comprises amorphous silicon or polysilicon.
3. The method of claim 1 , further comprising forming an extended gate oxide over the fins prior to forming the composite sacrificial gate.
4. The method of claim 1 , wherein the gate cut opening extends entirely through the composite sacrificial gate.
5. The method of claim 1 , wherein forming the gate cut opening comprises etching the sacrificial gate layer in a first etching step and etching the etch selective layer in a second etching step.
6. The method of claim 1 , wherein the gate cut opening has substantially vertical sidewalls.
7. The method of claim 1 , further comprising removing remaining portions of the composite sacrificial gate from over the fins to form gate contact openings, and forming a functional gate within the gate contact openings.
8. A method of forming a structure, comprising:
forming an etch selective layer over a plurality of semiconductor fins and extending between the fins;
forming a sacrificial gate layer over the etch selective layer;
forming a gate cut opening that extends through the sacrificial gate layer and the etch selective layer, wherein the gate cut opening is laterally spaced away from the fins, and forming the gate cut opening includes etching the etch selective layer to form an undercut region that extends laterally beneath the sacrificial gate layer; and
forming an isolation layer within the gate cut opening.
9. The method of claim 8 , wherein the etch selective layer comprises silicon germanium or doped silicon and the sacrificial gate layer comprises amorphous silicon or polysilicon.
10. The method of claim 8 , wherein forming the gate cut opening comprises etching the sacrificial gate layer in a first etching step and etching the etch selective layer in a second etching step.
11. A method of forming a structure, comprising:
forming an extended gate oxide over a plurality of semiconductor fins;
forming a composite sacrificial gate over a plurality of semiconductor fins after forming the extended gate oxide, wherein forming the composite sacrificial gate comprises forming an etch selective layer over the fins and forming a sacrificial gate layer over the etch selective layer;
forming a gate cut opening by etching the etch selective layer to form an undercut region that extends laterally beneath the sacrificial gate layer and through the composite sacrificial gate, wherein the gate cut opening is laterally spaced away from each of a pair of the fins; and
forming an isolation layer within the gate cut opening.
12. The method of claim 11 , wherein the etch selective layer comprises silicon germanium or doped silicon and the sacrificial gate layer comprises amorphous silicon or polysilicon.
13. The method of claim 11 , wherein the gate cut opening extends entirely through the composite sacrificial gate.
14. The method of claim 11 , further comprising removing remaining portions of the composite sacrificial gate from over the fins to form gate contact openings, and forming a functional gate within the gate contact openings.