Chemical coating of microwell for electrochemical detection device
The described embodiments may provide a method of fabricating a chemical detection device. The method may comprise forming a microwell above a CMOS device. The microwell may comprise a bottom surface and sidewalls. The method may further comprise applying a first chemical to be selectively attached to the bottom surface of the microwell, forming a metal oxide layer on the sidewalls of the microwell, and applying a second chemical to be selectively attached to the sidewalls of the microwell. The second chemical may lack an affinity to the first chemical.
1. A device comprising:
a substrate providing an array of chemical sensitive sensors, a sensor of the array of chemical sensitive sensors including a sensor pad;
a well structure defining an array of wells disposed over the array of chemical sensitive sensors, a well of the array of wells corresponding with the sensor pad of the sensor of the array of chemical sensitive sensors, the well structure defining a sidewall of the well, a bottom of the well disposed over the sensor pad; and
a chemical disposed over the sensor pad, the chemical including a functional group selected from the group consisting of phosphate, phosphonate, catechol, nitrocatechol, boronate, phenylboronate, imidazole, and silanol.
2. The device of claim 1 , wherein the sidewall of the well is substantially free of the chemical.
3. The device of claim 1 , wherein the functional group is selected from the group consisting of phosphate, phosphonate, catechol, and nitrocatechol.
4. The device of claim 3 , wherein the functional group is selected from the group consisting of phosphate and phosphonate.
5. The device of claim 1 , wherein the functional group includes phosphonate.
6. The device of claim 1 , wherein the chemical sensitive sensors are field effect transistor sensors.
7. The device of claim 1 , the substrate includes a CMOS layer and the chemical sensitive sensors are CMOS devices.
8. The device of claim 1 , further comprising a silane chemical disposed on the sidewall and not the bottom of the well of the array of wells, the silane chemical having the formula R—[Yn]—Si—[X1X2X3], wherein R is an organofunctional group, Y is (CH2) or (C2H4O), n is an integer, and [X1X2X3] comprises one or more hydrolysable groups.
9. The device of claim 8 , wherein [X1X2X3] includes an alkoxy group.
10. The device of claim 9 , wherein the silane chemical is a trialkoxy silane chemical.
11. The device of claim 9 , wherein the silane chemical is a dialkoxy silane chemical.
12. The device of claim 8 , wherein [X1X2X3] includes a halogen group.
13. The device of claim 8 , wherein Y is (CH2) and n is an integer from 1 to 20.
14. The device of claim 8 , wherein Y is (C2H4O) and n is an integer from 1 to 100.
15. The device of claim 8 , wherein R is selected from the group consisting of methyl, methylene, phenyl, benzyl, anilino, amino, amide, hydroxyl, aldehyde, alkoxy, halo, mercapto, carboxy, acyl, vinyl, allyl, styryl, epoxy, isocyanato, glycidoxy, and acryloxy.
16. The device of claim 8 , wherein R is an amino group.
17. The device of claim 8 , wherein R is an amide group.
18. The device of claim 1 , wherein the well structure comprises an oxide of silicon.
19. The device of claim 1 , wherein an exposed portion of the sensor pad includes a metal oxide.
20. The device of claim 1 , further comprising a metal oxide disposed over the sensor pad, the metal oxide selected from the group consisting of tantalum oxide, hafnium oxide, zirconium oxide, and aluminum oxide.