Dual-material mandrel for epitaxial crystal growth on silicon
In one example, a method for fabricating a semiconductor device includes etching a layer of silicon to form a plurality of fins and growing layers of a semiconductor material directly on sidewalls of the plurality of fins, wherein the semiconductor material and surfaces of the sidewalls have different crystalline properties.
1. A structure, comprising:
a silicon substrate having a top surface having a first crystal orientation defined by a Miller index of (100);
a buried oxide layer having a first side bonded directly on the top surface of the silicon substrate; and
a plurality of conducting channels positioned directly above a second side of the buried oxide layer that is opposite to the first side, such that the buried oxide layer separates the silicon substrate from the plurality of conducting channels, wherein each channel of the plurality of conducting channels is formed from an epitaxially grown non-silicon semiconductor material on sidewalls of a silicon-on-insulator layer and a surface oxide layer and thereafter removing the silicon-on-insulator layer and the surface oxide layer selective to the non-silicon semiconductor material, and wherein each channel of the plurality of conducting channels has sidewalls having a second crystal orientation defined by another Miller index of (111).
2. The structure of claim 1 , wherein the non-silicon semiconductor material is a Group III/V material.