Semiconductor fins with dielectric isolation at fin bottom
View Patent ↗A method is presented for forming dielectric isolated fins. The method includes forming a plurality of fin structures over a semiconductor substrate, forming spacers adjacent each of the plurality of fins, recessing the semiconductor substrate to form bottom fin profiles, and forming shallow trench isolation (STI) regions between the plurality of fins and the bottom fin profiles. The method further includes etching the STI regions, a select number of the plurality of fins, and a portion of a select number of the bottom fin profiles to create cavities between a mechanical anchor defined between a pair of fins of the plurality of fins, the etching resulting in undercutting of remaining fins.
1. A method for forming dielectric isolated fins, the method comprising:
forming a plurality of fins over a semiconductor substrate;
forming spacers adjacent each of the plurality of fins;
recessing the semiconductor substrate to form bottom fin profiles;
forming shallow trench isolation (STI) regions between the plurality of fins and the bottom fin profiles; and
etching the STI regions, a select number of the plurality of fins, and a portion of a select number of the bottom fin profiles to create cavities on opposed ends of a mechanical anchor defined between a pair of fins of the plurality of fins, the etching resulting in undercutting of remaining fins.
2. The method of claim 1 , further comprising filling the cavities with a dielectric.
3. The method of claim 2 , further comprising recessing the dielectric to expose the spacers, the recessing of the dielectric resulting in an irregular-shaped dielectric profile.
4. The method of claim 3 , further comprising stripping the spacers to expose the plurality of fins over the irregular-shaped dielectric profile.
5. The method of claim 1 , wherein the bottom fin profiles are tapered.
6. The method of claim 1 , wherein the etching is performed in three stages.
7. The method of claim 1 , wherein each of the plurality of fins is formed from a nanosheet stack.
8. A method for forming dielectric isolated fins, the method comprising:
forming a plurality of fins over a semiconductor substrate;
recessing the semiconductor substrate to form tapered bottom fin profiles;
forming shallow trench isolation (STI) regions between the plurality of fins and the tapered bottom fin profiles; and
undercutting the plurality of fins via a three-stage etch process, the third etch extending laterally and resulting in removal of bottom sections of the plurality of fins.
9. The method of claim 8 , further comprising forming spacers adjacent each of the plurality of fins.
10. The method of claim 9 , further comprising creating cavities between a mechanical anchor defined between a pair of fins of the plurality of fins.
11. The method of claim 10 , further comprising depositing a mask over a select number of the plurality of fins to create the mechanical anchor.
12. The method of claim 11 , wherein the mechanical anchor is an oxide pillar.
13. The method of claim 11 , further comprising filling the cavities with a dielectric.
14. The method of claim 13 , further comprising recessing the dielectric to expose the spacers, the recessing of the dielectric resulting in an irregular-shaped dielectric profile.
15. The method of claim 14 , further comprising stripping the spacers to expose the plurality of fins over the irregular-shaped dielectric profile.
16. The method of claim 8 , wherein the undercutting of the plurality of fins results in a non-linear bottom surface for each of the plurality of fins.