Electronic component with two substrates enclosing functional element and insulating film therein
An electronic component includes: a first substrate; a second substrate that includes a functional element formed on a lower surface of the second substrate, the second substrate being mounted on the first substrate so that the functional element faces an upper surface of the first substrate across an air gap; and an insulating film that is located on the upper surface of the first substrate, overlaps with at least a part of the functional element in plan view, faces the functional element across the air gap, and has a film thickness that is more than half of a distance between a lower surface of the functional element and the upper surface of the first substrate.
1. An electronic component comprising:
a first substrate;
a second substrate that includes a functional element formed on a lower surface of the second substrate, the second substrate being mounted on the first substrate so that the functional element faces an upper surface of the first substrate across an air gap; and
an insulating film that is located on the upper surface of the first substrate, overlaps with at least a part of the functional element in plan view, faces the functional element across the air gap, that has a film thickness that is more than half of a distance between a lower surface of the functional element and the upper surface of the first substrate, and that is made of an organic insulating material, a thermal conductivity of the insulating film being more than five times a thermal conductivity of air.
2. The electronic component according to claim 1 , wherein
a metal layer through which a high-frequency signal propagates is located on the upper surface of the first substrate, and
the insulating film does not overlap with the metal layer in plan view.
3. The electronic component according to claim 1 , wherein
a metal layer is located on the upper surface of the first substrate, and
the insulating film overlaps with none of the metal layer in plan view.
4. The electronic component according to claim 1 , wherein
the insulating film is in contact with the upper surface of the first substrate.
5. The electronic component according to claim 1 , wherein
the functional element is an acoustic wave element.
6. The electronic component according to claim 5 , further comprising:
a filter including the acoustic wave element.
7. The electronic component according to claim 6 , further comprising;
a multiplexer including the filter.
8. An electronic component comprising:
a first substrate;
a second substrate that includes a functional element formed on a lower surface of the second substrate, the second substrate being mounted on the first substrate so that the functional element faces an upper surface of the first substrate across an air gap; and
an insulating film that is located on the upper surface of the first substrate, overlaps with at least a part of the functional element in plan view, faces the functional element across the air gap, and has a film thickness that is more than half of a distance between a lower surface of the functional element and the upper surface of the first substrate,
wherein
a plurality of functional elements are located on the lower surface of the second substrate, and
the insulating film overlaps with one or some of the plurality of functional elements and does not overlap with a remaining functional element of the plurality of functional elements.
9. An electronic component comprising:
a first substrate;
a second substrate that includes an acoustic wave element formed on a lower surface of the second substrate, the second substrate being mounted on the first substrate so that the acoustic wave element faces an upper surface of the first substrate across an air gap;
an insulating film that is located on the upper surface of the first substrate, overlaps with at least a part of the acoustic wave element in plan view, faces the acoustic wave element across the air gap, and has a film thickness that is more than half of a distance between a lower surface of the acoustic wave element and the upper surface of the first substrate;
one or more series resonators that are connected in series between an input terminal and an output terminal and are the acoustic wave element; and
one or more parallel resonators that are connected in parallel between the input terminal and the output terminal and are the acoustic wave element, wherein
the insulating film overlaps with at least one of the one or more series resonators in plan view, and does not overlap with at least one of a remaining resonator of the one or more series resonators and the one or more parallel resonators in plan view.
10. The electronic component according to claim 9 , wherein
the insulating film overlaps with a series resonator of which both ends are coupled to series resonators among the one or more series resonators, and does not overlap with at least one of a remaining resonator of the one or more series resonators and the one or more parallel resonators.