IP Library Granted Patent US 10,679,930
Granted Patent B2
US 10,679,930 · App. 15/780,189 · Granted Jun 9, 2020

Metal core solder ball interconnector fan-out wafer level package

Inventors: Hyun Woo Lee (Chungcheongnam-do, KR); Jin Wook Jeong (Chungcheongnam-do, KR); Hyun Joo Kim (Gyeonggi-do, KR); Jin Young Ock (Gyeonggi-do, KR)
Assignee: HANA MICRON INC.
H01L23/49816H01L21/4853H01L21/6835H01L23/00H01L23/28H01L23/3128H01L23/3185H01L23/488H01L23/5389H01L24/16H01L24/19H01L24/20H01L25/0657H01L25/105H01L25/50H01L21/568H01L23/49827H01L23/49866H01L25/07H01L2221/68359H01L2224/04105H01L2224/12105H01L2224/1357H01L2224/1358H01L2224/13575H01L2224/13576H01L2224/13578H01L2224/13582H01L2224/13583H01L2224/13584H01L2224/16227H01L2224/18H01L2224/27436H01L2224/32145H01L2224/32245H01L2224/48227H01L2224/73253H01L2224/73267H01L2224/81191H01L2224/83005H01L2224/83191H01L2224/92244H01L2224/94H01L2225/0651H01L2225/1058H01L2924/1816H01L2924/18162
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Quick Facts
Patent No.
US 10,679,930
App. No.
15/780,189
Granted
Jun 9, 2020
Kind
B2
Abstract

A fan-out wafer level package is disclosed, which includes: a redistribution layer; a semiconductor chip electrically connected with the redistribution layer through a bump; a protective member protecting the semiconductor chip, wherein a part of the protective member is removed such that the upper surface of the semiconductor chip is exposed in order to dissipate heat and prevent warpage; and an interconnector disposed outside the semiconductor chip at substantially the same level and having a lower part electrically connected with the redistribution layer and an upper part not being covered with the protective member, wherein the interconnector includes a metal core solder ball, the metal core solder ball includes a metal core and a solder buffer between the metal core and the protective member, and the metal core is formed of a combination of copper (Cu), nickel (Ni), and silver (Ag).

Claims (14)

1. A fan-out wafer-level package comprising:

a redistribution layer;

a semiconductor chip electrically connected to the redistribution layer through a bump;

a protective member configured to protect the semiconductor chip; and

an interconnector disposed outside the semiconductor chip at substantially the same level as the semiconductor chip, wherein a lower portion of the interconnector is electrically connected to the redistribution layer and a top surface of the interconnector, a top surface of the protective member, and a top surface of the semiconductor chip are positioned to form a substantially uniform planar surface,

wherein the interconnector comprises a metal-core solder ball,

the metal-core solder ball comprises a metal core and a solder buffer interposed between the metal core and the protective member,

an upper portion of the metal-core solder ball comprises a surface of the metal core not covered by the solder buffer, and

the metal core comprises a combination of copper (Cu), nickel (Ni), or silver (Ag).

2. The fan-out wafer-level package of claim 1 , wherein the interconnector has one of a globular shape or an egg shape.

3. The fan-out wafer-level package of claim 2 , wherein the solder buffer is formed of a material having a higher ductility than a metal material of the metal core and includes tin (Sn) solder.

4. The fan-out wafer-level package of claim 2 , wherein the solder buffer includes a multilayered structure of solder and nickel (Ni) (or nickel alloy) layers.

5. The fan-out wafer-level package of claim 1 , wherein the solder buffer includes a multilayered structure of a conductive layer which is disposed inside thereof and formed of solder or nickel and a nonconductive layer which is disposed outside the conductive layer and formed of a material having a higher ductility than the conductive layer.

6. The fan-out wafer-level package of claim 1 , wherein the bump is a stud bump having a pointed end portion.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 31, 2018
From: LEE, HYUN WOO; JEONG, JIN WOOK; KIM, HYUN JOO; OCK, JIN YOUNG
To: HANA MICRON INC.
Reel/Frame 045948/0020 →
Priority Claims (2)
KR 10-2015-0169361 · Nov 30, 2015 · national
KR 10-2015-0169362 · Nov 30, 2015 · national
Continuity (1)
Related Publication 20180358288A1 · Dec 13, 2018
Cited By (3)
US 12,604,768 US 12,727,512 US 12,745,684