Semiconductor device and method of manufacturing the same
Disclosed are semiconductor devices and methods of manufacturing the same. The method comprises forming an active structure including a plurality of active patterns, a device isolation layer defining the active patterns, and a gate structure across the active patterns and extending in a first direction, forming a first mask pattern on the active structure, and forming a trench by using the first mask pattern as an etching mask to pattern the active structure. Forming the first mask pattern comprises forming in a first mask layer a plurality of first openings extending in a second direction intersecting the first direction, and forming in the first mask layer a plurality of second openings extending in a third direction intersecting the first and second directions.
1. A method of manufacturing a semiconductor device, the method comprising:
forming an active structure including a plurality of active patterns, a device isolation layer defining the active patterns, and a gate structure across the active patterns and extending in a first direction;
forming a first mask pattern on the active structure; and
forming a trench by using the first mask pattern as an etching mask to pattern the active structure,
wherein forming the first mask pattern comprises:
forming in a first mask layer a plurality of first openings extending in a second direction intersecting the first direction; and
forming in the first mask layer a plurality of second openings extending in a third direction intersecting the first and second directions.
2. The method of claim 1 , wherein each of the plurality of active patterns comprises:
a first impurity region; and
a plurality of second impurity regions spaced apart from each other across the first impurity region,
wherein forming the trench comprises forming a plurality of pillars in an upper portion of the active structure, the pillars being defined by the trench,
each of the pillars comprising upper portions of the second impurity regions.
3. The method of claim 2 , wherein each of the plurality of pillars has an elliptical shape in a plan view.
4. The method of claim 2 , wherein each of the plurality of pillars has a rhombic shape in a plan view.
5. The method of claim 1 , further comprising forming a second mask layer between the active structure and the first mask pattern,
wherein forming the trench comprises using the first mask pattern as an etching mask to pattern the second mask layer.
6. The method of claim 1 , wherein forming the plurality of first openings comprises:
forming a second mask layer on the first mask layer;
patterning the second mask layer to form a third opening extending in the second direction;
conformally forming a first dielectric film on the second mask layer;
forming a first filling layer filling the third opening;
removing the first dielectric film between the first filling layer and the second mask layer; and
using the first filling layer and the second mask layer as an etching mask to pattern the first mask layer.
7. The method of claim 6 , wherein forming the plurality of second openings comprises:
forming a second filling layer filling the plurality of first openings;
forming a third mask layer on the second filling layer;
patterning the third mask layer to form a fourth opening extending in the third direction;
conformally forming a second dielectric film on the third mask layer;
forming a third filling layer filling the fourth opening;
removing the second dielectric film between the third filling layer and the third mask layer; and
using the third filling layer and the third mask layer as an etching mask to pattern the second mask layer, the second filling layer, and the first mask layer.