Piezohydraulic actuator

1. A piezohydraulic actuator system, comprising:

a first chamber defined by a drive bellows filled with a hydraulic fluid and movable by a piezo actuator;

a second chamber defined by a hydraulic cylinder filled with the hydraulic fluid, which defines a first output;

a third chamber defined by an output bellows filled with the hydraulic fluid, which defines a second output; and

a fourth chamber filled with the hydraulic fluid, which defines a hydraulic fluid reservoir;

wherein the drive bellows defining the first chamber and filled with the hydraulic fluid and is hydraulically connected via a first check valve to the second chamber;

a hydraulic piston arranged in the hydraulic cylinder and coupled mechanically to the output bellows defining the third chamber;

wherein the drive bellows defining the first chamber is hydraulically connected via a second check valve to the fourth chamber defining the hydraulic fluid reservoir;

wherein the hydraulic fluid reservoir is hydraulically connected via a third check valve to the output bellows defining the third chamber, and the hydraulic cylinder defining the second chamber is hydraulically connected via a fourth check valve to the output bellows defining the third chamber.

2. The piezohydraulic actuator of claim 1 , wherein a hydraulic cross section of the hydraulic piston is smaller than a hydraulic cross section of the drive bellows defining the first chamber.

3. The piezohydraulic actuator of claim 1 , wherein in the fourth check valve is configured such that, when there is a rise in pressure in the first output as a result of an external counterforce, the fourth check valve opens such that additional hydraulic fluid is pumped to the second output.

4. The piezohydraulic actuator of claim 1 , wherein the third check valve has a leakage for hydraulic fluid to drift back from the output bellows to the reservoir.

5. The piezohydraulic actuator of claim 4 , comprising a restrictor for hydraulic fluid to drift back from the output bellows to the reservoir, the restrictor being hydraulically connected to the third check valve.

6. The piezohydraulic actuator of claim 1 , wherein the the hydraulic piston provides a mechanical output.

7. The piezohydraulic actuator of claim 1 , wherein: an end of the output bellows defining the third chamber provides a mechanical output, and

the hydraulic piston is connected to the end of the output bellows.

8. The piezohydraulic actuator of claim 1 , wherein the hydraulic cylinder and at least a portion of the hydraulic piston are positioned within the output bellows defining the third chamber.

9. The piezohydraulic actuator of claim 1 , wherein the piezo actuator is electrically activated by pulse width modulation of an activation voltage.

10. A method for operating a piezohydraulic actuator system including:

a first chamber defined by a drive bellows filled with a hydraulic fluid and movable by a piezo actuator;

a second chamber defined by a hydraulic cylinder filled with the hydraulic fluid, which defines a first output;

a third chamber defined by an output bellows filled with the hydraulic fluid, which defines a second output; and

a fourth chamber filled with the hydraulic fluid, which defines a hydraulic fluid reservoir;

wherein the drive bellows defining the first chamber and filled with the hydraulic fluid and is hydraulically connected via a first check valve to the second chamber;

a hydraulic piston arranged in the hydraulic cylinder and coupled mechanically to the output bellows defining the third chamber;

wherein the drive bellows defining the first chamber is hydraulically connected via a second check valve to the fourth chamber defining the hydraulic fluid reservoir; and

wherein the hydraulic fluid reservoir is hydraulically connected via a third check valve to the output bellows defining the third chamber, and the hydraulic cylinder defining the second chamber is hydraulically connected via a fourth check valve to the output bellows defining the third chamber;

wherein the method comprises:

expanding the piezo actuator, which causes a compression of the drive bellows, which in turn forces the hydraulic fluid against the first check valve, causing the first check valve to open at a set pressure to thereby allow the hydraulic fluid to flow into the hydraulic cylinder and cause a multiplication or reduction of a piezo stroke of the piezo actuator; and

contracting the piezo actuator, which generates a negative pressure in the drive bellows, which in turn causes the second check valve to open and thereby allow the hydraulic fluid to flow from the reservoir into the drive bellows;

wherein the expansion and contraction of the piezo actuator define a repeatable pumping cycle.

11. The method as claimed in claim 10 , wherein the third check valve opens in response to a negative pressure in the output bellows cause by the pumping of the hydraulic fluid into the hydraulic cylinder, and hydraulic fluid flows from the reservoir bellows into the output bellows via the opened third check valve.

12. The method as claimed in claim 10 , wherein, when the first output moves against a counterforce and a pressure in the hydraulic cylinder increases, the fourth check valve opens and additional hydraulic fluid flows from the drive bellows into the output bellows.

13. The method as claimed in claim 10 , wherein, when the first output and the second output are retracted, hydraulic fluid flows back into the reservoir bellows via the third check valve.