Assemblies having vertically-extending structures, and methods of forming assemblies having vertically-extending channel material pillars
Some embodiments include an assembly which has channel material pillars, and which has memory cells along the channel material pillars. A conductive structure is under the channel material pillars. The conductive structure has doped semiconductor material in direct contact with bottom regions of the channel material pillars. One or more of magnesium, scandium, yttrium and lanthanide elements is along the bottom regions of the channel material pillars. Some embodiments include methods of forming assemblies. A structure is formed, and a mass is formed against an upper surface of the structure. Plugs are formed within openings in the mass. The plugs comprise a second material over a first material. The first material includes one or more of magnesium, scandium, yttrium and lanthanide elements. Openings are formed to terminate on the first material, and are then extended through the first material. Channel material pillars are formed within the openings.
1. An assembly, comprising:
channel material pillars which extend vertically;
memory cells along the channel material pillars;
a conductive structure under the channel material pillars and comprising doped semiconductor material in direct contact with bottom regions of the channel material pillars; and
a material consisting of scandium oxide along the bottom regions of the channel material pillars, wherein the scandium oxide is within annular structures which extend around the bottom regions of the channel material pillars.
2. The assembly of claim 1 wherein the bottom regions of the channel material pillars include terminal ends of the channel material pillars, and include non-terminal segments above the terminal ends; and wherein the annular structures are along the non-terminal segments and not along the terminal ends.
3. The assembly of claim 2 wherein void regions are under the annular structures.
4. The assembly of claim 1 wherein the bottom regions of the channel material pillars include terminal ends of the channel material pillars; and wherein the annular structures are along the terminal ends.
5. An assembly comprising:
a horizontally-extending structure comprising a first semiconductor material;
one or more vertically-extending structures over the horizontally-extending structure and comprising a second semiconductor material; the second semiconductor material of said one or more vertically-extending structures directly contacting the first semiconductor material of the horizontally-extending structure along terminal ends of the one or more vertically-extending structures; said terminal ends of the one or more vertically-extending structures being comprised by bottom regions of the one or more vertically-extending structures; and
a material consisting of scandium oxide along the bottom regions of the one or more vertically-extending structures, the material consisting of scandium oxide being spaced from the bottom regions by one or more intervening material.
6. The assembly of claim 5 wherein the first and second semiconductor materials comprise a same composition as one another.
7. The assembly of claim 5 wherein the first and second semiconductor materials comprise different compositions relative to one another.
8. The assembly of claim 5 wherein both the first semiconductor material and the second semiconductor material comprise silicon.