Silicon carbide semiconductor device having halogen field limiting ring regions and method of manufacturing same
A semiconductor layer having n-type is made of silicon carbide, and has an element region and a terminal region. A plurality of field limiting ring regions having p-type are provided in the terminal region of the semiconductor layer, and are arranged spaced apart from one another. A field insulating film is provided in the terminal region of the semiconductor layer, and is in contact with the field limiting ring regions and the semiconductor layer. Each of the field limiting regions includes a halogen-containing field limiting ring part in contact with the field insulating film and containing halogen family atoms.
1. A silicon carbide semiconductor device, comprising:
a semiconductor substrate;
a semiconductor layer having n-type, provided on the semiconductor substrate, made of silicon carbide, and having an element region and a terminal region outside the element region;
a plurality of field limiting ring regions having p-type, provided in the terminal region of the semiconductor layer, and arranged spaced apart from one another; and
a field insulating film provided on the terminal region of the semiconductor layer, and in contact with the field limiting ring regions and the semiconductor layer, each of the field limiting regions comprising a halogen-containing field limiting ring part, the halogen-containing field limiting ring part being in contact with the field insulating film and comprising halogen family atoms.
2. The silicon carbide semiconductor device according to claim 1 , wherein the field insulating film comprises a halogen-containing field insulating part being located on the halogen-containing field limiting ring part and comprising halogen family atoms.
3. The silicon carbide semiconductor device according to claim 1 , wherein the semiconductor layer comprises a halogen-containing semiconductor part being in contact with the field insulating film between the field limiting ring regions and comprising halogen family atoms.
4. The silicon carbide semiconductor device according to claim 3 , wherein the halogen-containing semiconductor part has a larger negative fixed charge density than a negative fixed charge density of the halogen-containing field limiting ring part.
5. A method of manufacturing the silicon carbide semiconductor device of claim 1 , the method comprising:
forming the semiconductor layer on the semiconductor substrate;
forming the plurality of field limiting ring regions in the terminal region of the semiconductor layer by implanting acceptor ions;
performing activation annealing to electrically activate the acceptor ions;
forming the halogen-containing field limiting ring part by implanting the halogen family atoms into a part of each of the field limiting ring regions; and
forming the field insulating film on the terminal region of the semiconductor layer.
6. The method according to claim 5 , wherein the performing activation annealing to electrically activate the acceptor ions is performed before the forming the halogen-containing field limiting ring part.
7. The method according to claim 5 , wherein the performing activation annealing to electrically activate the acceptor ions is performed after the forming the halogen-containing field limiting ring part.
8. The method according to claim 5 , wherein the field insulating film comprises a thermal oxide film.
9. The method according to claim 5 , wherein at least a part of the field insulating film is formed before the forming the halogen-containing field limiting ring part, and, in the forming the halogen-containing field limiting ring part, the halogen family atoms are implanted through the at least a part of the field insulating film.