Light pipe window structure for low pressure thermal processes
Embodiments disclosed herein relate to a light pipe structure for thermal processing of semiconductor substrates. In one embodiment, a light pipe window structure for use in a thermal process chamber includes a transparent plate, and a plurality of light pipe structures formed in a transparent material that is coupled to the transparent plate, each of the plurality of light pipe structures comprising a reflective surface and having a longitudinal axis disposed in a substantially perpendicular relation to a plane of the transparent plate.
1. A light pipe window structure for use in a thermal process chamber, the light pipe window structure comprising:
a transparent plate;
a housing coupled to the transparent plate, the transparent plate having a recessed portion that is in a concave shape relative to the housing;
a plurality of openings formed in a transparent body sandwiched between the transparent plate and the housing, each of the plurality of openings comprising a light pipe structure, wherein each of the light pipe structures comprise a reflective surface on an interior surface of each of the openings and having a longitudinal axis disposed in a substantially perpendicular relation to a plane defined by a top surface of the transparent plate; and
a transparent rod having a length extending from the transparent body to a position below the housing, the transparent rod coupled with a fiber optic cable that is utilized to couple with a temperature sensor.
2. The light pipe window structure of claim 1 , further comprising:
a retainer joined with the transparent plate and surrounding the plurality of light pipe structures, wherein the retainer comprises a sealed enclosure.
3. The light pipe window structure of claim 1 , wherein the housing includes a plurality of tubes that each align with an opening of the plurality of openings.
4. The light pipe window structure of claim 1 , wherein each of the light pipe structures comprise a circular shape.
5. The light pipe window structure of claim 1 , wherein each of the light pipe structures comprise a polygonal shape.
6. The light pipe window structure of claim 1 , wherein the housing includes openings that substantially align with the openings formed in the transparent body.
7. The light pipe window structure of claim 1 , wherein the housing comprises an electrically conductive material.
8. The light pipe window structure of claim 1 , wherein the reflective surface comprises a reflective coating.
9. The light pipe window structure of claim 1 , wherein the reflective surface comprises a tubular sleeve made of a reflective material.
10. A light pipe window structure for use in a thermal process chamber, the light pipe window structure comprising:
a transparent plate including a recessed portion extending from a perimeter of the transparent plate to a center thereof;
a housing coupled to the transparent plate;
a plurality of light pipe structures formed in a transparent body sandwiched between the transparent plate and the housing, each of the plurality of light pipe structures comprising a reflective surface and having a longitudinal axis disposed in a substantially perpendicular relation to a plane defined by a top surface of the transparent plate, wherein the reflective surface comprises a reflective coating; and
a transparent rod having a length extending from the transparent body to a position below the housing, the transparent rod coupled with a fiber optic cable that is utilized to couple with a temperature sensor.
11. The light pipe window structure of claim 10 , wherein the housing includes openings that substantially align with the plurality of light pipe structures.
12. The light pipe window structure of claim 10 , wherein the housing comprises an electrically conductive material.
13. The light pipe window structure of claim 10 , further comprising:
a sealed enclosure joined with the transparent plate and surrounding the plurality of light pipe structures.
14. A light pipe window structure for use in a thermal process chamber, the light pipe window structure comprising:
a transparent plate including a recessed portion extending from a perimeter of the transparent plate to a center thereof;
a housing coupled to the transparent plate;
a plurality of openings formed in a transparent body that is coupled between the transparent plate and the housing, each of the plurality of openings comprising a light pipe structure, wherein each of the light pipe structures comprise a reflective surface and having a longitudinal axis disposed in a substantially perpendicular relation to a plane defined by a top surface of the transparent plate, wherein the reflective surface comprises a tubular sleeve made of a reflective material;
a sealed enclosure joined with the transparent plate and surrounding the plurality of light pipe structures
a transparent rod extending out of the transparent body to a position below the housing, the transparent rod coupled with a fiber optic cable that is utilized to couple with a temperature sensor.
15. The light pipe window structure of claim 14 , wherein the sealed enclosure includes a plurality of fluid conduits formed therein.
16. The light pipe window structure of claim 15 , wherein at least a portion of the plurality of fluid conduits comprise a first channel and a second channel for flowing a fluid between the plurality of light pipe structures adjacent thereto.