Light irradiation type heat treatment apparatus
A light diffusion plate is placed on an upper surface of an upper chamber window. A blasting process is applied to a lower surface of the light diffusion plate to provide the lower surface in the form of frosted glass. When the light diffusion plate is placed on the upper surface of the upper chamber window, the light diffusion plate and the upper chamber window do not closely adhere to each other. The frosted glass releases a mass of air entering between contact surfaces of the light diffusion plate and the upper chamber window to the outside even if the mass of air thermally expands during heat treatment. This restrains the occurrence of a phenomenon in which a thin layer of air is trapped between the light diffusion plate and the upper chamber window to prevent the sliding of the light diffusion plate resulting from the air layer.
1. A heat treatment apparatus for heating a substrate by irradiating the substrate with light, comprising:
a chamber for receiving a substrate therein;
a holder for holding said substrate in said chamber;
a light irradiation part provided over said chamber and for irradiating said substrate held by said holder with light;
a quartz window provided in an upper portion of said chamber and for transmitting light emitted from said light irradiation part therethrough into said chamber;
a light diffusion plate placed on an upper surface of said quartz window and for diffusing the light emitted from said light irradiation part; and
an air escape mechanism for allowing air remaining on contact surfaces of said quartz window and said light diffusion plate to escape, said air escape mechanism being provided in said quartz window or in said light diffusion plate,
wherein said air escape mechanism is a through hole extending through said light diffusion plate between upper and lower surfaces thereof.
2. A heat treatment apparatus for heating a substrate by irradiating the substrate with light, comprising:
a chamber for receiving a substrate therein;
a holder for holding said substrate in said chamber;
a light irradiation part provided over said chamber and for irradiating said substrate held by said holder with light;
a quartz window provided in an upper portion of said chamber and for transmitting light emitted from said light irradiation part therethrough into said chamber; and
a plurality of light diffusion plates provided in a stacked relation on an upper surface of said quartz window and for diffusing the light emitted from said light irradiation part,
wherein said plurality of light diffusion plates are provided with an air escape mechanism for allowing air remaining on contact surfaces of said plurality of light diffusion plates to escape, and
said air escape mechanism is a through hole extending through each of said plurality of light diffusion plates between upper and lower surfaces thereof.