Gas sensor packages
A gas sensor package is disclosed. The gas sensor package can include a housing defining a first chamber and a second chamber. An electrolyte can be provided in the first chamber. A gas inlet can provide fluid communication between the second chamber and the outside environs. The gas inlet can be configured to permit gas to enter the second chamber from the outside environs. An integrated device die can be mounted to the housing. The integrated device die can comprise a sensing element configured to detect the gas. The integrated device die can have a first side exposed to the first chamber and a second side exposed to the second chamber, with the first side opposite the second side.
1. A gas sensor package comprising:
a housing including a first chamber and a second chamber;
an electrolyte in the first chamber;
a gas inlet to provide fluid communication between the second chamber and the outside environs, the gas inlet configured to permit gas to enter the second chamber from the outside environs; and
an integrated device die mounted to the housing, the integrated device die comprising a sensor portion having a sensing element configured to detect the gas, the sensor portion of the integrated device die having a first side at least partially exposed to the first chamber and a second side at least partially exposed to the second chamber, the first side opposite the second side; and
a die cap coupled to the integrated device die, the die cap and integrated device die at least partially defining the first chamber.
2. The package of claim 1 , wherein the sensing element comprises at least one of platinum black, ruthenium black, iridium black, carbon, and gold.
3. The package of claim 1 , wherein the sensing element is at least partially disposed in the second chamber, wherein the integrated device die comprises a processor portion, the processor portion integrated with the sensor portion.
4. The package of claim 1 , further comprising one or more filters provided over the gas inlet.
5. The package of claim 1 , wherein the housing further includes an outer chamber, the outer chamber comprises a gas pathway and the gas enters the second chamber through the gas pathway.
6. The package of claim 1 , wherein the electrolyte comprises sulfuric acid or a solid electrolyte.
7. The package of claim 1 , wherein the integrated device die is partially embedded in a molding compound and the gas inlet is at least partially defined through an aperture of the molding compound.
8. The package of claim 1 , wherein the integrated device die at least partially seals the first chamber from the second chamber, wherein the integrated device die comprises a plurality of channels extending from the first side of the integrated device die to the second side of the integrated device die.
9. The package of claim 1 , further comprising a package substrate, wherein the integrated device die is mounted over the package substrate.
10. The package of claim 9 , further comprising a standoff structure that vertically offsets the integrated device die from the package substrate, wherein the standoff structure comprises lateral channels providing fluid communication between the second chamber and an outer chamber defined by the housing, the second chamber disposed between the integrated device die and the package substrate.
11. The package of claim 9 , further comprising a standoff structure that vertically offsets the integrated device die from the package substrate, wherein the first chamber is disposed between the integrated device die and the package substrate.
12. The package of claim 9 , further comprising an additional integrated device die mounted to the package substrate.
13. The package of claim 12 , wherein the integrated device die is mounted to a die shelf defined by a molding compound over the additional integrated device die, and the second chamber is disposed between the integrated device die and the die shelf.
14. The package of claim 1 , wherein the package comprises a package substrate and a package lid mounted to the package substrate, and the second chamber is defined at least in part by the package substrate and the package lid.
15. The package of claim 1 , wherein the package comprises a package substrate and a package lid mounted to the package substrate, and the second chamber is defined at least in part between the package substrate and the integrated device die.
16. A gas sensor package comprising:
a housing defining a first chamber;
an electrolyte in the first chamber;
a gas inlet configured to permit gas to enter the gas sensor package from outside environs; and
an integrated device die mounted to the housing, the integrated device die comprising one or more gas channels and a sensor portion disposed proximate to, and in fluid communication with, the one or more gas channels and having a sensing element configured to detect the gas, the sensor portion of the integrated device die having a first side at least partially exposed to the first chamber and a second side opposite the first side, and
wherein the gas sensor package is configured such that the gas passes through the one or more gas channels to impinge upon the sensing element.
17. The gas sensor package of claim 16 , wherein the housing further defines a second chamber, and the second side of the sensor portion is at least partially exposed to the second chamber.
18. The package of claim 16 , further comprising one or more filters between the gas inlet and the sensor portion in a pathway of the gas.
19. A gas sensor package comprising:
a housing having a gas inlet configured to permit gas to pass through;
an integrated device die mounted to the housing;
a die cap mounted to the integrated device die, the die cap at least partially defining a first chamber; and
an electrolyte in the first chamber,
wherein the integrated device die comprises a sensor portion having a sensing element configured to detect gas, the sensing element having a first side at least partially exposed to the first chamber and a second side opposite the first side, the second side of the sensing element configured to contact the gas.
20. The package of claim 19 , further comprising a package substrate, a package lid mounted to the package substrate, and a second chamber defined at least in part between the package substrate and the integrated device die.