Image sensor and method for manufacturing image sensor
View Patent ↗A method for manufacturing an image sensor comprises: forming a trench around a photodiode, wherein the photodiode comprises a first doped region with a first conductivity type dopant formed in a semiconductor substrate with a second conductivity type dopant; forming a covering portion in the trench, the covering portion with the second conductivity type dopant covering at least a portion of a sidewall or a bottom wall of the trench, wherein a doping concentration of the covering portion is higher than a doping concentration of the semiconductor substrate; and diffusing the second conductivity type dopant in the covering portion into the semiconductor substrate so as to form a second doped region with the second conductivity type dopant surrounding the at least a portion of the sidewall or the bottom wall of the trench.
1. A method for manufacturing an image sensor, comprising:
operating on a front side of a semiconductor substrate with a second conductivity type to form a photodiode by forming a first doped region with a first conductivity type in the semiconductor substrate, to form a first trench isolation structure around the photodiode, and to form a gate structure for the photodiode;
operating on a back side of the semiconductor substrate to form a trench around the photodiode such that the trench is located between the photodiode and an adjacent photodiode, wherein the back side of the semiconductor substrate is closer to a surface of the image sensor that receives light than the front side, and a depth of the trench is greater than a depth of the first trench isolation structure;
filling the trench with a material with the second conductivity type, wherein a doping concentration of the material is higher than a doping concentration of the semiconductor substrate; and
performing a heating process so that a second conductivity type dopant in the material diffuses into the semiconductor substrate so as to form a second doped region with the second conductivity type dopant surrounding the trench, and controlling a heating temperature and heating time in the heating process so as to prevent the second doped region from contacting the first doped region, wherein the material and the second doped region form a second trench isolation structure together.
2. The method according to claim 1 , wherein the material is a dielectric material.
3. The method according to claim 1 , wherein the material is borosilicate glass, and the second conductivity type dopant in the material is boron.
4. The method according to claim 3 , wherein a mole percentage of the boron in the borosilicate glass ranges from 1% to 10%.
5. The method according to claim 1 , wherein the heating temperature in the heating process ranges from 400° C. to 700° C.
6. The method according to claim 1 , wherein a width of the second doped region ranges from 10 nm to 30 nm.
7. The method according to claim 1 , wherein the first conductivity type is an N type and the second conductivity type is a P type.