Conductive layer, thin film transistor and manufacturing methods therefor, array substrate and display device
The present disclosure relates to a conductive layer, a thin film transistor and manufacturing methods therefor, an array substrate and a display device, in the field of displays. The conductive layer comprises: a metal layer and an organophosphorus-metal complex covering the metal layer. In the embodiments of the present disclosure, the organophosphorus-metal complex is manufactured on the surface of the metal layer to form the conductive layer. The conductive layer is adopted as an electrode material. In one aspect, the organophosphorus-metal complex has conductivity and can prevent the surface of metal from making contact with oxygen, thereby avoiding metal oxidation under the premise of not affecting the performances of the electrode when serving as a material of the electrode in a TFT. In the other aspect, the organophosphorus-metal complex can increase a binding force between the metal and photoresist and avoids stripping of the photoresist. Therefore, etching liquid is prevented from etching the metal in a position without the need of etching. The conductive layer provided by the present disclosure has the performances in the above two aspects. Therefore, the stability and electronic transmission performances of the electrode can be improved by adopting such a conductive layer to manufacture the electrode of the thin film transistor.
1. A preparing method for a conductive layer, comprising:
forming a metal layer; and
forming a layer of organophosphorus-metal complex on the metal layer,
wherein,
the forming of the layer of organophosphorus-metal complex on the metal layer comprises using a wet-etching device to spray a phosphorus-containing liquid on a surface of the metal layer, to form the layer of organophosphorus-metal complex; or
the forming of the layer of organophosphorus-metal complex on the metal layer comprises reacting a metal powder with a phosphorus-containing liquid, and drying the reacted metal powder and phosphorus-containing liquid; using the dried reacted metal powder and phosphorus-containing liquid as a target material, and performing a sputtering process to manufacture the layer of organophosphorus-metal complex on the metal layer.
2. The preparing method of claim 1 , wherein the metal layer is a copper layer, and the layer of organophosphorus-metal complex is an organophosphorus-copper complex layer; or the metal layer is an aluminum layer, and the layer of organophosphorus-metal complex is an organophosphorus-aluminum complex layer.
3. The preparing method of claim 1 , wherein the phosphorus-containing liquid is an organophosphorus compound solution, solutions of phosphoric acid and derivatives thereof, a phosphite ester solution or a phosphorus-containing heterocyclic compound solution.
4. A manufacturing method for a thin film transistor, comprising:
providing a base; and
forming a gate electrode, a gate electrode insulating layer, an active layer and a source/drain electrode on the base in sequence,
wherein at least one of the gate electrode and the source/drain electrode is formed by performing the following steps:
forming a metal layer;
forming a layer of organophosphorus-metal complex on the metal layer; and
performing a patterning treatment on the metal layer and the layer of organophosphorus-metal complex thereon,
wherein the gate electrode is obtained by performing the patterning treatment on the metal layer and the layer of organophosphorus-metal complex thereon, and
the method further comprises performing a medium-temperature tempering treatment on the gate electrode, a temperature of the medium-temperature tempering treatment being lower than a recrystallization temperature of a metal used in forming the metal layer.
5. The manufacturing method of claim 4 , wherein the metal layer is a copper layer, and the layer of organophosphorus-metal complex is an organophosphorus-copper complex layer; or the metal layer is an aluminum layer, and the organophosphorus-metal complex is an organophosphorus-aluminum complex layer.
6. The manufacturing method of claim 4 , wherein when the source/drain electrode is obtained by performing the patterning treatment on the metal layer and the layer of organophosphorus-metal complex thereon, the method further comprises:
performing a medium-temperature tempering treatment on the source/drain electrode, a temperature of the medium-temperature tempering treatment being lower than a recrystallization temperature of a metal used in forming the metal layer.
7. The preparing method of claim 1 , wherein a thickness of the metal layer is 3000-5000 Å.
8. The preparing method of claim 1 , wherein a thickness of the organophosphorus-metal complex is 500-2000 Å.