Laminate, method for manufacturing laminate, semiconductor device, and method for manufacturing the semiconductor device

1. A laminate comprising a substrate, and at least two resin layers,

each of the resin layers being independently brought into contact, in at least a part of the surface thereof, with the other resin layer;

each of the resin layers independently having a Young's modulus exceeding 2.8 GPa and not exceeding 5.0 GPa, and, an elongation after fracture exceeding 50% and not exceeding 200%; and

each of the resin layers further having a three-dimensional radical crosslinked structure therein,

wherein each of said at least two resin layers is obtained by curing a resin composition,

each resin composition for each of said resin layers independently comprises a resin selected from a polyimide precursor and a polyimide, and a bifunctional polymerizable compound having two ethylenic unsaturated bond-containing groups,

the polyimide precursor is represented by Formula (2):

in Formula (2), each of A 1 and A 2 independently represents an oxygen atom or NH, R 111 represents a divalent organic group given by —Ar-L-Ar—, where each Ar independently represents an aromatic group, and L represents an aliphatic hydrocarbon group having 1 to 10 carbon atoms and is optionally substituted by fluorine atom(s), —O—, —CO—, —S—, —SO 2 —, —NHCO—, or a group composed of two or more of them, R 115 represents a tetravalent organic group, each of R 113 and R 114 independently represents a hydrogen atom or monovalent organic group, provided that at least one of R 113 and R 114 represents a polymerizable group-containing group,

the polyimide is represented by Formula (4):

in Formula (4), R 131 represents a divalent organic group given by —Ar-L-Ar—, where each Ar independently represents an aromatic group, and L represents an aliphatic hydrocarbon group having 1 to 10 carbon atoms and is optionally substituted by fluorine atom(s), —O—, —CO—, —S—, —SO 2 — or —NHCO—, as well as a group composed of two or more of them, and R 132 represents a tetravalent organic group, provided that at least one of R 131 or R 132 represents a polymerizable group-containing group,

the bifunctional polymerizable compound having two ethylenic unsaturated bond-containing groups comprises esters formed between a polyhydric alcohol compound and an unsaturated carboxylic acid,

the polyimide precursor and the polyimide have a weight average molecular weight of 18,000 to 30,000, and

the ratio by mass of the polyimide precursor or the polyimide and the bifunctional polymerizable compound is 95/5 to 30/70.

2. The laminate of claim 1 , wherein each of the resin layers independently has a tensile strength exceeding 160 MPa and not exceeding 300 MPa.

3. The laminate of claim 1 , having 3 to 7 resin layers in total.

4. The laminate of claim 1 , having a metal layer disposed between two adjoining layers of the at least two resin layers.

5. The laminate of claim 4 , wherein the metal layer contains copper.

6. The laminate according to claim 1 , wherein the ratio by mass of the polyimide precursor or the polyimide and the bifunctional polymerizable compound in each resin composition is 90/10 to 50/50.

7. The laminate according to claim 1 , wherein the polyimide precursor and the polyimide have a weight-average molecular weight of 18,000 to 25,000.

8. The laminate according to claim 1 , wherein the ratio by mass of the polyimide precursor or the polyimide and the bifunctional polymerizable compound is 82/18 to 30/70.

9. A semiconductor device comprising the laminate described in claim 1 .