Porous semiconductor handle substrate
An integrated circuit (IC) may include an active device layer on a front-side surface of a semiconductor device substrate. The IC may also include a front-side dielectric layer having a first surface opposite a second surface, the first surface contacting the active device layer. The IC may further include a porous semiconductor handle substrate contacting the second surface of the front-side dielectric layer. The porous semiconductor handle substrate may be uniformly doped.
1. An integrated circuit (IC), comprising:
an active device layer on a front-side surface of a semiconductor layer on an insulator layer of a semiconductor on insulator (SOI) device substrate;
a front-side dielectric layer having a first surface opposite a second surface, the first surface contacting the active device layer; and
a semiconductor handle substrate having a porous semiconductor layer contacting the second surface of the front-side dielectric layer and distal from the SOI device substrate, in which the semiconductor handle substrate is uniformly doped, and the porous semiconductor layer comprises a high porosity portion corresponding to dicing streets on the semiconductor device substrate, a first low porosity portion and a second low porosity portion adjacent to and side-by-side with the high porosity portion, the high porosity portion between the first low porosity portion and the second low porosity portion.
2. The IC of claim 1 , in which the porous semiconductor layer has a depth greater than 10 microns.
3. The IC of claim 1 , in which the semiconductor handle substrate comprises a bulk silicon wafer having the porous semiconductor layer.
4. The IC of claim 1 , in which the porous semiconductor layer is sealed or capped with oxide.
5. The IC of claim 1 , further comprising an oxide and/or adhesive between the porous semiconductor layer of the semiconductor handle substrate and the front-side dielectric layer.
6. The IC of claim 1 , further comprising an oxide within pores of the porous semiconductor layer of the semiconductor handle substrate.
7. The IC of claim 1 , in which the porous semiconductor layer comprises sealed oxide porous silicon.
8. The IC of claim 1 , in which the porous semiconductor layer comprises different porosities.
9. The IC of claim 1 , in which the porous semiconductor layer comprises different levels of porosity in different layers.
10. The IC of claim 9 , in which the different levels of porosity are graded or stepped.
11. The IC of claim 1 , in which the porous semiconductor layer comprises a 50 micron thick layer proximate to the front-side dielectric layer.
12. The IC of claim 1 , integrated into an RF front end module, the RF front end module incorporated into at least one of a music player, a video player, an entertainment unit, a navigation device, a communications device, a personal digital assistant (PDA), a fixed location data unit, a mobile phone, and a portable computer.
13. An integrated circuit (IC), comprising:
an active device layer on a front-side surface of a semiconductor layer on an insulator layer of a semiconductor on insulator (SOI) device substrate;
a front-side dielectric layer having a first surface opposite a second surface, the first surface contacting the active device layer; and
means for reducing radio frequency (RF) harmonics contacting the second surface of the front-side dielectric layer and distal from the SOI device substrate, and the means for reducing RF harmonics comprising a high porosity portion corresponding to dicing streets on the semiconductor device substrate, a first low porosity portion and a second low porosity portion adjacent to and side-by-side with the high porosity portion, the high porosity portion between the first low porosity portion and the second low porosity portion.
14. The IC of claim 13 , integrated into an RF front end module, the RF front end module incorporated into at least one of a music player, a video player, an entertainment unit, a navigation device, a communications device, a personal digital assistant (PDA), a fixed location data unit, a mobile phone, and a portable computer.