Semiconductor structure, package structure, and manufacturing method thereof
A semiconductor structure including at least one integrated circuit component is provided. The at least one integrated circuit component includes a first semiconductor substrate and a second semiconductor substrate electrically coupled to the first semiconductor substrate, wherein the first semiconductor substrate and the second semiconductor substrate are bonded through a first hybrid bonding interface, and at least one of the first semiconductor substrate or the second semiconductor substrate includes at least one first embedded capacitor.
1. A semiconductor structure, comprising:
at least one integrated circuit component, comprising:
a first semiconductor substrate and a second semiconductor substrate electrically coupled to the first semiconductor substrate, wherein the first semiconductor substrate and the second semiconductor substrate are bonded through a first hybrid bonding interface, at least one of the first semiconductor substrate or the second semiconductor substrate comprises at least one first embedded capacitor, and the second semiconductor substrate comprises first through silicon vias penetrating therethrough, wherein the first through silicon vias are free from the first semiconductor substrate.
2. The semiconductor structure of claim 1 , wherein the first semiconductor substrate comprises first hybrid bonding structures disposed on a first side of the first semiconductor substrate, the second semiconductor substrate comprises second hybrid bonding structures disposed on a second side of the second semiconductor substrate, and the first semiconductor substrate and the second semiconductor substrate are electrically coupled to each other through bonding the first hybrid bonding structures and the second hybrid bonding structures.
3. The semiconductor structure of claim 1 , wherein the at least one first embedded capacitor comprises a trench capacitor, and a capacitance density of the at least one first embedded capacitor is greater than or substantially equal to nF/mm 2 .
4. The semiconductor structure of claim 1 , wherein the first through silicon vias are electrically coupled to the first semiconductor substrate.
5. The semiconductor structure of claim 1 , wherein the at least one integrated circuit component further comprises a third semiconductor substrate, and the second semiconductor substrate and the third semiconductor substrate are bonded through a second hybrid bonding interface, wherein the second semiconductor substrate is located between the first semiconductor substrate and the third semiconductor substrate.
6. The semiconductor structure of claim 5 , wherein the second semiconductor substrate comprises third hybrid bonding structures disposed on a third side opposite to the second side, the third semiconductor substrate comprises fourth hybrid bonding structures disposed on a fourth side of the third semiconductor substrate, and the second semiconductor substrate and the third semiconductor substrate are electrically coupled to each other through bonding the third hybrid bonding structures and the fourth hybrid bonding structures.
7. The semiconductor structure of claim 5 , wherein the third semiconductor substrate further comprises at least one second embedded capacitor.
8. The semiconductor structure of claim 7 , wherein the third semiconductor substrate further comprises second through silicon vias arranged aside of a positioning location of the at least one second embedded capacitor, and the second through silicon vias are electrically coupled to the first semiconductor substrate.
9. The semiconductor structure of claim 7 , wherein the at least one second embedded capacitor comprises a trench capacitor, and a capacitance density of the at least one second embedded capacitor is greater than or substantially equal to 100 nF/mm 2 .
10. A package structure, comprising:
at least one integrated circuit component, comprising:
a first semiconductor substrate having at least one first active device therein; and
a second semiconductor substrate having at least one first capacitor embedded therein, electrically coupled to the first semiconductor substrate, wherein the second semiconductor substrate comprises first through silicon vias penetrating therethrough, the first semiconductor substrate and the second semiconductor substrate are bonded through a first hybrid bonding interface being free of the first through silicon vias;
an insulating encapsulation, encapsulating the at least one integrated circuit component; and
a redistribution structure, located on the insulating encapsulation and electrically coupled to the at least one integrated circuit component.
11. The package structure of claim 10 , wherein the first semiconductor substrate further comprises first hybrid bonding structures disposed on an active surface of the first semiconductor substrate, the second semiconductor substrate further comprises second hybrid bonding structures disposed on a first side of the second semiconductor substrate, and the first semiconductor substrate and the second semiconductor substrate are electrically coupled to each other through bonding the first hybrid bonding structures and the second hybrid bonding structures.
12. The package structure of claim 10 , wherein the first through silicon vias are arranged aside of a positioning location of the at least one first capacitor, and the first through silicon vias are electrically coupled to the first semiconductor substrate.
13. The package structure of claim 10 , wherein the at least one integrated circuit component further comprises a third semiconductor substrate having at least one second active device or at least one second capacitor embedded therein, and the second semiconductor substrate and the third semiconductor substrate are bonded through a second hybrid bonding interface, wherein the second semiconductor substrate is located between the first semiconductor substrate and the third semiconductor substrate.
14. The package structure of claim 13 , wherein the second semiconductor substrate further comprises third hybrid bonding structures disposed on a second side opposite to the first side, the third semiconductor substrate further comprises fourth hybrid bonding structures disposed on an active surface of the third semiconductor substrate, and the second semiconductor substrate and the third semiconductor substrate are electrically coupled to each other through bonding the third hybrid bonding structures and the fourth hybrid bonding structures.
15. The package structure of claim 13 , wherein the third semiconductor substrate further comprises second through silicon vias arranged aside of a positioning location of the at least one second active device or the at least one second capacitor, and the second through silicon vias are electrically coupled to the first semiconductor substrate.
16. The package structure of claim 13 , wherein the at least one first capacitor and the at least one second capacitor comprise trench capacitors having a capacitance density greater than or substantially equal to 100 nF/mm 2 .
17. The package structure of claim 13 , wherein the at least one second active device comprises a cache device, a memory device, a memory device stack, or combinations thereof.
18. A manufacturing method of a semiconductor structure, comprising:
forming at least one integrated circuit component, comprising:
providing a first semiconductor substrate and a second semiconductor substrate, wherein at least one of the first semiconductor substrate and the second semiconductor substrate comprises at least one first embedded capacitor, and the second semiconductor substrate comprises first through silicon vias penetrating therethrough, wherein the first through silicon vias are free from the first semiconductor substrate; and
performing a first fusion bonding step to bond the first semiconductor substrate and the second semiconductor substrate for electrically connection thereof.
19. The manufacturing method of claim 18 , wherein forming the at least one integrated circuit component further comprises:
providing a third semiconductor substrate having at least one first active device or at least one second embedded capacitor; and
performing a second fusion bonding step to bond the second semiconductor substrate and the third semiconductor substrate for electrically connection thereof, wherein the second semiconductor substrate is disposed between the first semiconductor substrate and the third semiconductor substrate.
20. A manufacturing method of a package structure, comprising:
forming a semiconductor structure as claimed in claim 18 ;
disposing the semiconductor structure on a carrier;
forming an insulating encapsulation to encapsulate the semiconductor structure;
planarizing the insulating encapsulation;
forming a redistribution structure on the semiconductor structure and on the insulating encapsulation; and
disposing conductive elements on the redistribution structure.