IP Library Granted Patent US 10,811,279
Granted Patent B2
US 10,811,279 · App. 15/689,026 · Granted Oct 20, 2020

Flip-chip high speed components with underfill

Inventors: Francois Pelletier (St. Augustin, CA); Michael Vitic (Chelsea, CA)
Assignee: Ciena Corporation
H01L21/563H01L24/12H01L24/17H01L24/13H01L24/16H01L2224/131H01L2224/13144H01L2224/13147H01L2224/165H01L2224/16227H01L2224/26145H01L2224/26175H01L2224/32225H01L2224/73204H01L2224/92125H01L2924/01029H01L2924/01079H01L2924/1068H01L2924/10253H01L2924/10271H01L2924/10329H01L2924/10335H01L2924/10337H01L2924/10342H01L2924/1421H01L2924/15159H01L2924/30105H01L2924/351
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Quick Facts
Patent No.
US 10,811,279
App. No.
15/689,026
Granted
Oct 20, 2020
Kind
B2
Abstract

A flip-chip manufacture is described. Methods of blocking adhesive underfill in flip-chip high speed component manufacture include creating topology discontinuities to prevent adhesive underfill material from interacting with RF sensitive regions on substrates.

Claims (25)

1. A flip-chip structure utilizing two adjacent layers which are a first layer and a second layer, the flip-chip structure comprising:

one or more electrical connectors providing connectivity between the two adjacent layers;

a topology discontinuity formed, on a surface of the first layer, outside at least one sensitive region of the flip-chip structure, wherein a height of the topology discontinuity in a direction extending from the surface of the first layer toward the second layer is less than a height of the one or more electrical connectors, and wherein the topology discontinuity is one of a surface variation and a surface roughness of the first layer; and

adhesive underfill material, between a pair of opposed surfaces of the two adjacent layers, substantially outside the at least one sensitive region due to the topology discontinuity to create a substantially adhesive underfill material-free region.

2. The flip-chip structure as claimed in claim 1 , the topology discontinuity being configured to snag a liquid meniscus of the adhesive underfill material.

3. The flip-chip structure as claimed in claim 1 , the topology discontinuity being configured to snag a liquid meniscus of a non-adhesive underfill material immiscible with the adhesive underfill material.

4. The flip-chip structure as claimed in claim 1 , wherein the substantially adhesive underfill material-free region is vented.

5. The flip-chip structure as claimed in claim 1 , wherein a portion of the topology discontinuity extends to an edge of the flip-chip structure and a via in one of the first layer and the second layer is configured to vent the substantially adhesive underfill material-free region.

6. The flip-chip structure as claimed in claim 1 , wherein the sensitive region comprises an area around the one or more electrical connectors.

7. The flip-chip structure as claimed in claim 6 , wherein the one or more electrical connectors comprise at least one of solder balls, gold ball bumps, gold stud bumps, copper pillars and pads.

8. The flip-chip structure as claimed in claim 1 , wherein the two adjacent layers having different coefficients of thermal expansion.

9. The flip-chip structure as claimed in claim 1 , wherein the first layer is a silicon photonics chip and the second layer is a substrate of a different technology than the silicon photonics chip.

10. The flip-chip structure as claimed in claim 9 , wherein the silicon photonics chip includes high-speed Radio Frequency (RF) circuits which interact with the adhesive underfill material, and wherein the high-speed RF circuits are in the at least one sensitive region.

11. The flip-chip structure as claimed in claim 1 , wherein the topology discontinuity is surface roughness provided via one of incomplete sputtering, superficial surface etching, removing an oxide layer of a passivation layer, and scribing.

12. The flip-chip structure as claimed in claim 1 , wherein the topology discontinuity is surface roughness that is one or more of discontinuous, dotted, and dashed on the bottom of the first layer.

13. The flip-chip structure as claimed in claim 12 , wherein a dimension for the surface roughness is dependent on a surface tension of the adhesive underfill material.

14. A method for providing a flip-chip structure utilizing two adjacent layers which are a first layer and a second layer, the flip-chip structure comprising:

providing one or more electrical connectors providing connectivity between the two adjacent layers;

providing a topology discontinuity formed, on a surface of the first layer, outside at least one sensitive region of the flip-chip structure, wherein a height of the topology discontinuity in a direction extending from the surface of the first layer toward the second layer is less than a height of the one ore more electrical connectors, and wherein the topology discontinuity is one of a surface variation and a surface roughness surface of the first layer; and

providing adhesive underfill material, between a pair of opposed surfaces of the two adjacent layers, substantially outside the at least one sensitive region due to the topology discontinuity to create a substantially adhesive underfill material-free region.

15. The method as claimed in claim 14 , the topology discontinuity being configured to snag a liquid meniscus of the adhesive underfill material.

16. The method as claimed in claim 14 , the topology discontinuity being configured to snag a liquid meniscus of a non-adhesive underfill material immiscible with the adhesive underfill material.

17. The method as claimed in claim 14 , wherein the substantially adhesive underfill material-free region is vented.

18. The method as claimed in claim 14 , wherein a portion of the topology discontinuity extends to an edge of the flip-chip structure and a via in one of the first layer and the second layer is configured to vent the substantially adhesive underfill material-free region.

19. The method as claimed in claim 14 , wherein the sensitive region comprises an area around the one or more electrical connectors.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 29, 2017
From: PELLETIER, FRANCOIS; VITIC, MICHAEL
To: CIENA CORPORATION
Reel/Frame 043431/0724 →
Continuity (1)
Related Publication 20190067037A1 · Feb 28, 2019
Cited By (4)
US 12,237,442 US 12,596,225 US 12,615,854 US 12,676,672