Solid-state imaging device having light shielding member to reduce transmitted light
In a solid-state imaging device, a photoelectric conversion unit, a transfer transistor, and at least a part of electric charge holding unit, among pixel constituent elements, are disposed on a first semiconductor substrate. An amplifying transistor, a signal processing circuit other than a reset transistor, and a plurality of common output lines, to which signals are read out from a plurality of pixels, are disposed on a second semiconductor substrate.
1. An imaging device comprising:
a first substrate;
a second substrate;
a plurality of photoelectric conversion units disposed in the first substrate; and
a plurality of analog-to-digital converters disposed in the second substrate and configured to convert an analog signal based on a charge generated by a corresponding one of the photoelectric conversion units into a digital signal,
wherein a first light shielding member is disposed between the first substrate and the second substrate, the first light shielding member being configured to reduce light transmitted through one of the photoelectric conversion units to enter one of the analog-to-digital converters.
2. The imaging device according to claim 1 , further comprising a plurality of pixels, wherein each of the plurality of pixels includes one of the photoelectric conversion units and one of the analog-to-digital converters.
3. The imaging device according to claim 2 ,
wherein each of the plurality of pixels includes a transfer unit configured to transfer the charge generated by the photoelectric conversion unit to a floating node,
wherein the transfer unit is disposed in the first substrate, and
wherein the floating node is electrically connected to the analog-to-digital converter.
4. The s imaging device according to claim 1 ,
wherein the first substrate includes a first semiconductor region, and a first insulating film disposed on the first semiconductor region,
wherein the second substrate includes a second semiconductor region, and a second insulating film disposed on the second semiconductor region, and
wherein an electric connection between the first substrate and the second substrate is established by a connection of conductors disposed on the first and second insulating films.
5. The imaging device according to claim 1 , wherein a second light shielding member is disposed between the first substrate and the second substrate, the second light shielding member being configured to reduce light transmitted through the one of the photoelectric conversion units to enter the one of the analog-to-digital converters.
6. The imaging device according to claim 5 ,
wherein a first part of the one of the analog-to-digital converters is located within a first projection region defined by vertically projecting the first light shielding member onto the second substrate,
wherein a second part of the one of the analog-to-digital converters is located outside the first projection region and is located within a second projection region defined by vertically projecting the second light shielding member onto the second substrate.
7. The imaging device according to claim 5 , wherein the second light shielding member is disposed between the first light shielding member and the second substrate.
8. The imaging device according to claim 1 , wherein an entirety of the one of the analog-to-digital converters is located within a projection region defined by vertically projecting the first light shielding member onto the second substrate side.
9. The imaging device according to claim 1 , wherein the analog-to-digital converters each includes a differential amplification circuit.
10. An imaging device comprising:
a first substrate;
a second substrate;
a plurality of photoelectric conversion units disposed in the first substrate;
a plurality of analog-to-digital converters disposed in the second substrate and configured to convert an analog signal based on a charge generated by a corresponding one of the photoelectric conversion units into a digital signal; and
a wiring disposed between the first substrate and the second substrate,
wherein at least part of one of the analog-to-digital converters is located within a first projection region defined by vertically projecting the wiring onto the second substrate side, and
wherein a second projection region defined by vertically projecting one of the photoelectric conversion units onto the second substrate side overlaps with the first projection region.
11. The imaging device according to claim 10 , further comprising a plurality of pixels, wherein each of the plurality of pixels includes one of the photoelectric conversion units and one of the analog-to-digital converters.
12. The imaging device according to claim 11 , wherein each of the plurality of pixels includes:
a floating diffusion region disposed in the first substrate and connected to the analog-to-digital converter; and
a transfer unit configured to transfer the charge generated by the photoelectric conversion unit to the floating diffusion region.
13. The imaging device according to claim 12 ,
wherein the plurality of pixels includes at least a first pixel and a second pixel adjacent to the first pixel,
wherein the first substrate includes a first isolation portion, and
wherein the photoelectric conversion unit and the floating diffusion region of the first pixel are isolated from the photoelectric conversion unit and the floating diffusion region of the second pixel by the first isolation portion.
14. The imaging device according to claim 13 , wherein each of the plurality of pixels includes a transistor disposed in the second substrate.
15. The imaging device according to claim 14 ,
wherein the second substrate includes a second isolation portion, and
wherein the transistor of the first pixel are isolated from the transistor of the second pixel by the second isolation portion.
16. The imaging device according to claim 15 , wherein the analog-to-digital converter of the first pixel are isolated from the analog-to-digital converter of the second pixel by the second isolation portion.
17. The imaging device according to claim 16 , wherein the transfer unit includes a transfer gate electrode disposed between the first substrate and the wiring.
18. The imaging device according to claim 17 , wherein the transistor includes a gate electrode disposed between the second substrate and the wiring.
19. The imaging device according to claim 18 , wherein the wiring is formed of a metal.
20. The imaging device according to claim 19 , wherein the wiring is connected to at least one selected from a group that consists of the floating diffusion region, the transfer gate electrode, the transistor and the analog-to-digital converter.
21. The imaging device according to claim 20 , wherein the transistor is configured to reset a voltage of the floating diffusion region.
22. The imaging device according to claim 20 ,
wherein the transistor forms the analog-to-digital converter, and
wherein the analog-to-digital converter includes a differential amplification circuit.
23. The imaging device according to claim 19 ,
wherein the wiring is configured to provide a reference voltage for the plurality of pixels, and
wherein the analog-to-digital converter includes a differential amplification circuit.
24. The imaging device according to claim 19 ,
wherein each of the plurality of pixels includes a switch configured to switch a capacitance of the floating diffusion region, and
wherein the wiring is connected to the switch.
25. The imaging device according to claim 19 ,
wherein each of the plurality of pixels further includes:
a capacitor; and
a switch configured to connect the floating diffusion region to the capacitor.
26. The imaging device according to claim 19 ,
wherein each of the plurality of pixels further includes a circuit configured to change a sensitivity of the pixel.
27. The imaging device according to claim 25 ,
wherein the device forms a backside-illumination-type imaging device in which light enters from a surface on the other side of a surface where the gate of the transistor is provided.
28. The imaging device according to claim 27 , further comprising:
a first contact plug in contact with the first substrate; and
a second contact plug in contact with the second substrate, wherein
the wiring is connected to at least one of the first and second contact plugs.
29. The imaging device according to claim 28 ,
wherein at least one of the first and second contact plugs is configured to provide a reference voltage to the first or second substrate.