Gate contact over active region with self-aligned source/drain contact
A method for forming a semiconductor structure is provided. The method includes depositing a dielectric material in a first opening above a first source/drain region in a first region of the semiconductor structure and in a second and a third opening above a respective second and a third source/drain region in a second region of the silicon structure. There is a gate region between the second and third source/drain regions. The method etches away the dielectric material deposited in the first opening and deposits an organic material in the first opening. The method further etches a region above the gate region between the second and third source/drain regions to expose the gate region and form a fourth opening and removes the organic material from the first opening. The method deposits a metal in the first opening and the fourth opening.
1. A method for forming a semiconductor structure, the method comprising:
depositing a dielectric material in a first opening above a first source/drain region in a first region of the semiconductor structure and in a second and a third opening above a respective second and a third source/drain region, a gate region between the second and third source/drain regions, in a second region of the semiconductor structure;
etching away the dielectric material deposited in the first opening;
depositing an organic material in the first opening;
etching a region above the gate region between the second and third source/drain regions to expose the gate region and form a fourth opening;
removing the organic material from the first opening; and
depositing a metal in the first opening and the fourth opening.
2. The method of claim 1 further comprising, prior to etching away the dielectric material deposited in the first opening, depositing an organic planarization layer above the first region and the second region.
3. The method of claim 2 further comprising forming an opening in the organic planarization layer above the first source/drain region after depositing the organic planarization layer above the first region and the second region.
4. The method of claim 2 further comprising, prior to etching the region above the gate region between the second and third source/drain regions to expose the gate region and form the fourth opening, removing a portion of the organic planarization layer above gate region.
5. The method of claim 2 further comprising, prior to depositing a metal in the first opening and the fourth opening, removing the organic planarization layer.
6. The method of claim 1 further comprising, prior to depositing a metal in the first opening and the fourth opening, depositing a liner metal layer in the first opening and the fourth opening.
7. The method of claim 6 further comprising depositing a barrier layer in the first opening and the fourth opening.
8. A method for forming a semiconductor structure, the method comprising:
depositing an etch stop along walls of a first opening above a first source/drain region in a first region of the semiconductor structure and along walls of a second and a third opening above a respective second and a third source/drain region, a gate region between the second and third source/drain regions, in a second region of the semiconductor structure;
depositing an oxide in the first opening, the second opening, and the third opening;
etching away the oxide deposited in the first opening;
depositing an organic material in the first opening;
etching a region above the gate region between the second and third source/drain regions to expose the gate region and form a fourth opening;
removing the organic material from the first opening; and
depositing a metal in the first opening and the fourth opening.
9. The method of claim 8 further comprising, prior to etching away the dielectric material deposited in the first opening, depositing an organic planarization layer above the first region and the second region.
10. The method of claim 9 further comprising forming an opening in the organic planarization layer above the first source/drain region after depositing the organic planarization layer above the first region and the second region.
11. The method of claim 9 further comprising, prior to etching the region above the gate region between the second and third source/drain regions to expose the gate region and form the fourth opening, removing a portion of the organic planarization layer above gate region.
12. The method of claim 9 further comprising, prior to depositing a metal in the first opening and the fourth opening, removing the organic planarization layer.
13. The method of claim 8 further comprising removing the liner from the first opening prior to depositing the metal in the first opening.
14. The method of claim 8 , wherein the etch stop comprises hafnium oxide.
15. The method of claim 8 , wherein the etch stop comprises aluminum oxide.